JPS5749154A - Specimen holder - Google Patents

Specimen holder

Info

Publication number
JPS5749154A
JPS5749154A JP7088381A JP7088381A JPS5749154A JP S5749154 A JPS5749154 A JP S5749154A JP 7088381 A JP7088381 A JP 7088381A JP 7088381 A JP7088381 A JP 7088381A JP S5749154 A JPS5749154 A JP S5749154A
Authority
JP
Japan
Prior art keywords
specimen holder
specimen
holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7088381A
Other languages
Japanese (ja)
Inventor
Edowaado Waaburu Chiyaaruzu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commonwealth Scientific and Industrial Research Organization CSIRO
Original Assignee
Commonwealth Scientific and Industrial Research Organization CSIRO
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commonwealth Scientific and Industrial Research Organization CSIRO filed Critical Commonwealth Scientific and Industrial Research Organization CSIRO
Publication of JPS5749154A publication Critical patent/JPS5749154A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/24—Base structure
    • G02B21/26—Stages; Adjusting means therefor

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Sampling And Sample Adjustment (AREA)
JP7088381A 1980-05-13 1981-05-13 Specimen holder Pending JPS5749154A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
AU351480 1980-05-13

Publications (1)

Publication Number Publication Date
JPS5749154A true JPS5749154A (en) 1982-03-20

Family

ID=3693966

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7088381A Pending JPS5749154A (en) 1980-05-13 1981-05-13 Specimen holder

Country Status (2)

Country Link
JP (1) JPS5749154A (en)
GB (1) GB2076989A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005010158A (en) * 2003-06-20 2005-01-13 Fei Co Sample carrier for carrying sample to be irradiated with electron beam

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005010158A (en) * 2003-06-20 2005-01-13 Fei Co Sample carrier for carrying sample to be irradiated with electron beam

Also Published As

Publication number Publication date
GB2076989A (en) 1981-12-09

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