JPS5748868B2 - - Google Patents

Info

Publication number
JPS5748868B2
JPS5748868B2 JP49051035A JP5103574A JPS5748868B2 JP S5748868 B2 JPS5748868 B2 JP S5748868B2 JP 49051035 A JP49051035 A JP 49051035A JP 5103574 A JP5103574 A JP 5103574A JP S5748868 B2 JPS5748868 B2 JP S5748868B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP49051035A
Other languages
Japanese (ja)
Other versions
JPS50143485A (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP49051035A priority Critical patent/JPS5748868B2/ja
Publication of JPS50143485A publication Critical patent/JPS50143485A/ja
Publication of JPS5748868B2 publication Critical patent/JPS5748868B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Light Receiving Elements (AREA)
JP49051035A 1974-05-08 1974-05-08 Expired JPS5748868B2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP49051035A JPS5748868B2 (enExample) 1974-05-08 1974-05-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP49051035A JPS5748868B2 (enExample) 1974-05-08 1974-05-08

Publications (2)

Publication Number Publication Date
JPS50143485A JPS50143485A (enExample) 1975-11-18
JPS5748868B2 true JPS5748868B2 (enExample) 1982-10-19

Family

ID=12875535

Family Applications (1)

Application Number Title Priority Date Filing Date
JP49051035A Expired JPS5748868B2 (enExample) 1974-05-08 1974-05-08

Country Status (1)

Country Link
JP (1) JPS5748868B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5255807U (enExample) * 1975-10-20 1977-04-22
JPH081490U (ja) * 1996-05-24 1996-10-18 東洋自動機株式会社 真空包装装置

Also Published As

Publication number Publication date
JPS50143485A (enExample) 1975-11-18

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