JPS5748868B2 - - Google Patents

Info

Publication number
JPS5748868B2
JPS5748868B2 JP49051035A JP5103574A JPS5748868B2 JP S5748868 B2 JPS5748868 B2 JP S5748868B2 JP 49051035 A JP49051035 A JP 49051035A JP 5103574 A JP5103574 A JP 5103574A JP S5748868 B2 JPS5748868 B2 JP S5748868B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP49051035A
Other languages
Japanese (ja)
Other versions
JPS50143485A (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP49051035A priority Critical patent/JPS5748868B2/ja
Publication of JPS50143485A publication Critical patent/JPS50143485A/ja
Publication of JPS5748868B2 publication Critical patent/JPS5748868B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Light Receiving Elements (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP49051035A 1974-05-08 1974-05-08 Expired JPS5748868B2 (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP49051035A JPS5748868B2 (en:Method) 1974-05-08 1974-05-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP49051035A JPS5748868B2 (en:Method) 1974-05-08 1974-05-08

Publications (2)

Publication Number Publication Date
JPS50143485A JPS50143485A (en:Method) 1975-11-18
JPS5748868B2 true JPS5748868B2 (en:Method) 1982-10-19

Family

ID=12875535

Family Applications (1)

Application Number Title Priority Date Filing Date
JP49051035A Expired JPS5748868B2 (en:Method) 1974-05-08 1974-05-08

Country Status (1)

Country Link
JP (1) JPS5748868B2 (en:Method)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5255807U (en:Method) * 1975-10-20 1977-04-22
JPH081490U (ja) * 1996-05-24 1996-10-18 東洋自動機株式会社 真空包装装置

Also Published As

Publication number Publication date
JPS50143485A (en:Method) 1975-11-18

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