JPS5748863B2 - - Google Patents
Info
- Publication number
- JPS5748863B2 JPS5748863B2 JP3660876A JP3660876A JPS5748863B2 JP S5748863 B2 JPS5748863 B2 JP S5748863B2 JP 3660876 A JP3660876 A JP 3660876A JP 3660876 A JP3660876 A JP 3660876A JP S5748863 B2 JPS5748863 B2 JP S5748863B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Bipolar Transistors (AREA)
- Electron Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3660876A JPS52119870A (en) | 1976-03-31 | 1976-03-31 | Manufacture of semi-conductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3660876A JPS52119870A (en) | 1976-03-31 | 1976-03-31 | Manufacture of semi-conductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52119870A JPS52119870A (en) | 1977-10-07 |
JPS5748863B2 true JPS5748863B2 (en) | 1982-10-19 |
Family
ID=12474501
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3660876A Granted JPS52119870A (en) | 1976-03-31 | 1976-03-31 | Manufacture of semi-conductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52119870A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0220983Y2 (en) * | 1983-09-27 | 1990-06-07 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5717171A (en) * | 1980-07-04 | 1982-01-28 | Mitsubishi Electric Corp | Manufacture of semiconductor device |
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1976
- 1976-03-31 JP JP3660876A patent/JPS52119870A/en active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0220983Y2 (en) * | 1983-09-27 | 1990-06-07 |
Also Published As
Publication number | Publication date |
---|---|
JPS52119870A (en) | 1977-10-07 |