JPS5748863B2 - - Google Patents

Info

Publication number
JPS5748863B2
JPS5748863B2 JP3660876A JP3660876A JPS5748863B2 JP S5748863 B2 JPS5748863 B2 JP S5748863B2 JP 3660876 A JP3660876 A JP 3660876A JP 3660876 A JP3660876 A JP 3660876A JP S5748863 B2 JPS5748863 B2 JP S5748863B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP3660876A
Other languages
Japanese (ja)
Other versions
JPS52119870A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3660876A priority Critical patent/JPS52119870A/en
Publication of JPS52119870A publication Critical patent/JPS52119870A/en
Publication of JPS5748863B2 publication Critical patent/JPS5748863B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Bipolar Transistors (AREA)
  • Electron Beam Exposure (AREA)
JP3660876A 1976-03-31 1976-03-31 Manufacture of semi-conductor device Granted JPS52119870A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3660876A JPS52119870A (en) 1976-03-31 1976-03-31 Manufacture of semi-conductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3660876A JPS52119870A (en) 1976-03-31 1976-03-31 Manufacture of semi-conductor device

Publications (2)

Publication Number Publication Date
JPS52119870A JPS52119870A (en) 1977-10-07
JPS5748863B2 true JPS5748863B2 (en) 1982-10-19

Family

ID=12474501

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3660876A Granted JPS52119870A (en) 1976-03-31 1976-03-31 Manufacture of semi-conductor device

Country Status (1)

Country Link
JP (1) JPS52119870A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0220983Y2 (en) * 1983-09-27 1990-06-07

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5717171A (en) * 1980-07-04 1982-01-28 Mitsubishi Electric Corp Manufacture of semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0220983Y2 (en) * 1983-09-27 1990-06-07

Also Published As

Publication number Publication date
JPS52119870A (en) 1977-10-07

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