JPS5746655B2 - - Google Patents
Info
- Publication number
- JPS5746655B2 JPS5746655B2 JP4971775A JP4971775A JPS5746655B2 JP S5746655 B2 JPS5746655 B2 JP S5746655B2 JP 4971775 A JP4971775 A JP 4971775A JP 4971775 A JP4971775 A JP 4971775A JP S5746655 B2 JPS5746655 B2 JP S5746655B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4971775A JPS51126779A (en) | 1975-04-25 | 1975-04-25 | Fine pattern processing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4971775A JPS51126779A (en) | 1975-04-25 | 1975-04-25 | Fine pattern processing method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS51126779A JPS51126779A (en) | 1976-11-05 |
| JPS5746655B2 true JPS5746655B2 (en)) | 1982-10-05 |
Family
ID=12838929
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4971775A Granted JPS51126779A (en) | 1975-04-25 | 1975-04-25 | Fine pattern processing method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS51126779A (en)) |
-
1975
- 1975-04-25 JP JP4971775A patent/JPS51126779A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS51126779A (en) | 1976-11-05 |