JPS5746182B2 - - Google Patents
Info
- Publication number
- JPS5746182B2 JPS5746182B2 JP55175783A JP17578380A JPS5746182B2 JP S5746182 B2 JPS5746182 B2 JP S5746182B2 JP 55175783 A JP55175783 A JP 55175783A JP 17578380 A JP17578380 A JP 17578380A JP S5746182 B2 JPS5746182 B2 JP S5746182B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/10—Lenses
- H01J37/14—Lenses magnetic
- H01J37/141—Electromagnetic lenses
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17578380A JPS56143648A (en) | 1980-12-15 | 1980-12-15 | Multipolar magnetic field device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17578380A JPS56143648A (en) | 1980-12-15 | 1980-12-15 | Multipolar magnetic field device |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10999874A Division JPS5152890A (ja) | 1974-09-26 | 1974-09-26 | Takyokujibasochi |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56143648A JPS56143648A (en) | 1981-11-09 |
| JPS5746182B2 true JPS5746182B2 (ko) | 1982-10-01 |
Family
ID=16002169
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17578380A Granted JPS56143648A (en) | 1980-12-15 | 1980-12-15 | Multipolar magnetic field device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS56143648A (ko) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58161290U (ja) * | 1982-04-22 | 1983-10-27 | 東京瓦斯株式会社 | 螺旋管の接続装置 |
| JPH0259358B2 (ko) * | 1984-05-22 | 1990-12-12 | Hitachi Metals Ltd |
-
1980
- 1980-12-15 JP JP17578380A patent/JPS56143648A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58161290U (ja) * | 1982-04-22 | 1983-10-27 | 東京瓦斯株式会社 | 螺旋管の接続装置 |
| JPH0259358B2 (ko) * | 1984-05-22 | 1990-12-12 | Hitachi Metals Ltd |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS56143648A (en) | 1981-11-09 |