JPS574558Y2 - - Google Patents
Info
- Publication number
- JPS574558Y2 JPS574558Y2 JP11455075U JP11455075U JPS574558Y2 JP S574558 Y2 JPS574558 Y2 JP S574558Y2 JP 11455075 U JP11455075 U JP 11455075U JP 11455075 U JP11455075 U JP 11455075U JP S574558 Y2 JPS574558 Y2 JP S574558Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Measuring Phase Differences (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11455075U JPS574558Y2 (fr) | 1975-08-19 | 1975-08-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11455075U JPS574558Y2 (fr) | 1975-08-19 | 1975-08-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5227245U JPS5227245U (fr) | 1977-02-25 |
| JPS574558Y2 true JPS574558Y2 (fr) | 1982-01-27 |
Family
ID=28595582
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11455075U Expired JPS574558Y2 (fr) | 1975-08-19 | 1975-08-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS574558Y2 (fr) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2023119134A (ja) | 2022-02-16 | 2023-08-28 | 東京エレクトロン株式会社 | プラズマ処理装置 |
-
1975
- 1975-08-19 JP JP11455075U patent/JPS574558Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5227245U (fr) | 1977-02-25 |