JPS574558Y2 - - Google Patents

Info

Publication number
JPS574558Y2
JPS574558Y2 JP11455075U JP11455075U JPS574558Y2 JP S574558 Y2 JPS574558 Y2 JP S574558Y2 JP 11455075 U JP11455075 U JP 11455075U JP 11455075 U JP11455075 U JP 11455075U JP S574558 Y2 JPS574558 Y2 JP S574558Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP11455075U
Other languages
Japanese (ja)
Other versions
JPS5227245U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11455075U priority Critical patent/JPS574558Y2/ja
Publication of JPS5227245U publication Critical patent/JPS5227245U/ja
Application granted granted Critical
Publication of JPS574558Y2 publication Critical patent/JPS574558Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Measuring Phase Differences (AREA)
JP11455075U 1975-08-19 1975-08-19 Expired JPS574558Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11455075U JPS574558Y2 (enrdf_load_stackoverflow) 1975-08-19 1975-08-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11455075U JPS574558Y2 (enrdf_load_stackoverflow) 1975-08-19 1975-08-19

Publications (2)

Publication Number Publication Date
JPS5227245U JPS5227245U (enrdf_load_stackoverflow) 1977-02-25
JPS574558Y2 true JPS574558Y2 (enrdf_load_stackoverflow) 1982-01-27

Family

ID=28595582

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11455075U Expired JPS574558Y2 (enrdf_load_stackoverflow) 1975-08-19 1975-08-19

Country Status (1)

Country Link
JP (1) JPS574558Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7650834B2 (ja) 2022-02-16 2025-03-25 東京エレクトロン株式会社 プラズマ処理装置

Also Published As

Publication number Publication date
JPS5227245U (enrdf_load_stackoverflow) 1977-02-25

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