JPS5743891Y2 - - Google Patents
Info
- Publication number
- JPS5743891Y2 JPS5743891Y2 JP16393478U JP16393478U JPS5743891Y2 JP S5743891 Y2 JPS5743891 Y2 JP S5743891Y2 JP 16393478 U JP16393478 U JP 16393478U JP 16393478 U JP16393478 U JP 16393478U JP S5743891 Y2 JPS5743891 Y2 JP S5743891Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16393478U JPS5743891Y2 (ja) | 1978-11-30 | 1978-11-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16393478U JPS5743891Y2 (ja) | 1978-11-30 | 1978-11-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5580368U JPS5580368U (ja) | 1980-06-03 |
| JPS5743891Y2 true JPS5743891Y2 (ja) | 1982-09-28 |
Family
ID=29161009
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16393478U Expired JPS5743891Y2 (ja) | 1978-11-30 | 1978-11-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5743891Y2 (ja) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5864022A (ja) * | 1981-10-14 | 1983-04-16 | Semiconductor Energy Lab Co Ltd | プラズマ気相装置 |
| JPS58175824A (ja) * | 1983-03-28 | 1983-10-15 | Semiconductor Energy Lab Co Ltd | プラズマ気相反応用装置 |
-
1978
- 1978-11-30 JP JP16393478U patent/JPS5743891Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5580368U (ja) | 1980-06-03 |