JPS574374Y2 - - Google Patents

Info

Publication number
JPS574374Y2
JPS574374Y2 JP11565975U JP11565975U JPS574374Y2 JP S574374 Y2 JPS574374 Y2 JP S574374Y2 JP 11565975 U JP11565975 U JP 11565975U JP 11565975 U JP11565975 U JP 11565975U JP S574374 Y2 JPS574374 Y2 JP S574374Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP11565975U
Other languages
Japanese (ja)
Other versions
JPS5229053U (ko
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11565975U priority Critical patent/JPS574374Y2/ja
Publication of JPS5229053U publication Critical patent/JPS5229053U/ja
Application granted granted Critical
Publication of JPS574374Y2 publication Critical patent/JPS574374Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP11565975U 1975-08-22 1975-08-22 Expired JPS574374Y2 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11565975U JPS574374Y2 (ko) 1975-08-22 1975-08-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11565975U JPS574374Y2 (ko) 1975-08-22 1975-08-22

Publications (2)

Publication Number Publication Date
JPS5229053U JPS5229053U (ko) 1977-03-01
JPS574374Y2 true JPS574374Y2 (ko) 1982-01-27

Family

ID=28596620

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11565975U Expired JPS574374Y2 (ko) 1975-08-22 1975-08-22

Country Status (1)

Country Link
JP (1) JPS574374Y2 (ko)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8736170B1 (en) * 2011-02-22 2014-05-27 Fei Company Stable cold field emission electron source
US9984846B2 (en) * 2016-06-30 2018-05-29 Kla-Tencor Corporation High brightness boron-containing electron beam emitters for use in a vacuum environment

Also Published As

Publication number Publication date
JPS5229053U (ko) 1977-03-01

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