JPS5743384U - - Google Patents

Info

Publication number
JPS5743384U
JPS5743384U JP12160480U JP12160480U JPS5743384U JP S5743384 U JPS5743384 U JP S5743384U JP 12160480 U JP12160480 U JP 12160480U JP 12160480 U JP12160480 U JP 12160480U JP S5743384 U JPS5743384 U JP S5743384U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12160480U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12160480U priority Critical patent/JPS5743384U/ja
Publication of JPS5743384U publication Critical patent/JPS5743384U/ja
Pending legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00Axial-flow pumps
    • F04D19/02Multi-stage pumps
    • F04D19/04Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042Turbomolecular vacuum pumps
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00Details, component parts, or accessories
    • F04D29/40Casings; Connections of working fluid
    • F04D29/52Casings; Connections of working fluid for axial pumps
    • F04D29/54Fluid-guiding means, e.g. diffusers
    • F04D29/541Specially adapted for elastic fluid pumps
    • F04D29/542Bladed diffusers

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
JP12160480U 1980-08-26 1980-08-26 Pending JPS5743384U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12160480U JPS5743384U (en) 1980-08-26 1980-08-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12160480U JPS5743384U (en) 1980-08-26 1980-08-26

Publications (1)

Publication Number Publication Date
JPS5743384U true JPS5743384U (en) 1982-03-09

Family

ID=29482263

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12160480U Pending JPS5743384U (en) 1980-08-26 1980-08-26

Country Status (1)

Country Link
JP (1) JPS5743384U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60143192U (en) * 1984-03-02 1985-09-21 セイコー精機株式会社 Turbo molecular pump blade shape
JPH04219495A (en) * 1990-02-16 1992-08-10 Varian Spa Stator for turbo-molecular pump

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60143192U (en) * 1984-03-02 1985-09-21 セイコー精機株式会社 Turbo molecular pump blade shape
JPH04219495A (en) * 1990-02-16 1992-08-10 Varian Spa Stator for turbo-molecular pump

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