JPS5743384U - - Google Patents
Info
- Publication number
- JPS5743384U JPS5743384U JP12160480U JP12160480U JPS5743384U JP S5743384 U JPS5743384 U JP S5743384U JP 12160480 U JP12160480 U JP 12160480U JP 12160480 U JP12160480 U JP 12160480U JP S5743384 U JPS5743384 U JP S5743384U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/52—Casings; Connections of working fluid for axial pumps
- F04D29/54—Fluid-guiding means, e.g. diffusers
- F04D29/541—Specially adapted for elastic fluid pumps
- F04D29/542—Bladed diffusers
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12160480U JPS5743384U (en) | 1980-08-26 | 1980-08-26 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12160480U JPS5743384U (en) | 1980-08-26 | 1980-08-26 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5743384U true JPS5743384U (en) | 1982-03-09 |
Family
ID=29482263
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12160480U Pending JPS5743384U (en) | 1980-08-26 | 1980-08-26 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5743384U (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60143192U (en) * | 1984-03-02 | 1985-09-21 | セイコー精機株式会社 | Turbo molecular pump blade shape |
JPH04219495A (en) * | 1990-02-16 | 1992-08-10 | Varian Spa | Stator for turbo-molecular pump |
-
1980
- 1980-08-26 JP JP12160480U patent/JPS5743384U/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60143192U (en) * | 1984-03-02 | 1985-09-21 | セイコー精機株式会社 | Turbo molecular pump blade shape |
JPH04219495A (en) * | 1990-02-16 | 1992-08-10 | Varian Spa | Stator for turbo-molecular pump |