JPS5741514Y2 - - Google Patents
Info
- Publication number
- JPS5741514Y2 JPS5741514Y2 JP9883377U JP9883377U JPS5741514Y2 JP S5741514 Y2 JPS5741514 Y2 JP S5741514Y2 JP 9883377 U JP9883377 U JP 9883377U JP 9883377 U JP9883377 U JP 9883377U JP S5741514 Y2 JPS5741514 Y2 JP S5741514Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9883377U JPS5741514Y2 (en) | 1977-07-22 | 1977-07-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9883377U JPS5741514Y2 (en) | 1977-07-22 | 1977-07-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5425510U JPS5425510U (en) | 1979-02-20 |
| JPS5741514Y2 true JPS5741514Y2 (en) | 1982-09-11 |
Family
ID=29034973
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9883377U Expired JPS5741514Y2 (en) | 1977-07-22 | 1977-07-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5741514Y2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4741957B2 (en) * | 2006-02-16 | 2011-08-10 | 芝浦メカトロニクス株式会社 | Substrate processing equipment |
-
1977
- 1977-07-22 JP JP9883377U patent/JPS5741514Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5425510U (en) | 1979-02-20 |