JPS5741179B2 - - Google Patents

Info

Publication number
JPS5741179B2
JPS5741179B2 JP52147205A JP14720577A JPS5741179B2 JP S5741179 B2 JPS5741179 B2 JP S5741179B2 JP 52147205 A JP52147205 A JP 52147205A JP 14720577 A JP14720577 A JP 14720577A JP S5741179 B2 JPS5741179 B2 JP S5741179B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP52147205A
Other versions
JPS5480097A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14720577A priority Critical patent/JPS5480097A/ja
Priority to US05/966,621 priority patent/US4238706A/en
Publication of JPS5480097A publication Critical patent/JPS5480097A/ja
Publication of JPS5741179B2 publication Critical patent/JPS5741179B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/10—Rotary anodes; Arrangements for rotating anodes; Cooling rotary anodes
    • H01J35/105—Cooling of rotating anodes, e.g. heat emitting layers or structures
    • H01J35/106—Active cooling, e.g. fluid flow, heat pipes

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • X-Ray Techniques (AREA)
JP14720577A 1977-12-09 1977-12-09 Soft x-ray tube anti-cathode and its manufacture Granted JPS5480097A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP14720577A JPS5480097A (en) 1977-12-09 1977-12-09 Soft x-ray tube anti-cathode and its manufacture
US05/966,621 US4238706A (en) 1977-12-09 1978-12-05 Soft x-ray source and method for manufacturing the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14720577A JPS5480097A (en) 1977-12-09 1977-12-09 Soft x-ray tube anti-cathode and its manufacture

Publications (2)

Publication Number Publication Date
JPS5480097A JPS5480097A (en) 1979-06-26
JPS5741179B2 true JPS5741179B2 (ja) 1982-09-01

Family

ID=15424929

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14720577A Granted JPS5480097A (en) 1977-12-09 1977-12-09 Soft x-ray tube anti-cathode and its manufacture

Country Status (2)

Country Link
US (1) US4238706A (ja)
JP (1) JPS5480097A (ja)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4477921A (en) * 1981-11-27 1984-10-16 Spire Corporation X-Ray lithography source tube
US4584699A (en) * 1984-01-06 1986-04-22 The Perkin-Elmer Corporation X-ray anode assembly
US4644576A (en) * 1985-04-26 1987-02-17 At&T Technologies, Inc. Method and apparatus for producing x-ray pulses
US5018181A (en) * 1987-06-02 1991-05-21 Coriolis Corporation Liquid cooled rotating anodes
DE3923571A1 (de) * 1989-07-17 1991-01-24 Licentia Gmbh Roentgenroehre und verfahren zu deren herstellung
US5851725A (en) * 1993-01-26 1998-12-22 The United States Of America As Represented By The Secretary Of Commerce Exposure of lithographic resists by metastable rare gas atoms
US6282262B1 (en) 1999-11-10 2001-08-28 Varian Medical Systems, Inc. X-ray tube and method of manufacture
AU2003302786A1 (en) * 2002-12-11 2004-06-30 Koninklijke Philips Electronics N.V. X-ray source for generating monochromatic x-rays
US8243876B2 (en) 2003-04-25 2012-08-14 Rapiscan Systems, Inc. X-ray scanners
GB0812864D0 (en) * 2008-07-15 2008-08-20 Cxr Ltd Coolign anode
GB0525593D0 (en) 2005-12-16 2006-01-25 Cxr Ltd X-ray tomography inspection systems
US10483077B2 (en) 2003-04-25 2019-11-19 Rapiscan Systems, Inc. X-ray sources having reduced electron scattering
US9046465B2 (en) 2011-02-24 2015-06-02 Rapiscan Systems, Inc. Optimization of the source firing pattern for X-ray scanning systems
US7508916B2 (en) * 2006-12-08 2009-03-24 General Electric Company Convectively cooled x-ray tube target and method of making same
GB0901338D0 (en) 2009-01-28 2009-03-11 Cxr Ltd X-Ray tube electron sources

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51103709A (ja) * 1975-03-08 1976-09-13 Kazuo Hashimoto Denwajidootaihoshikioyobisochi

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3694685A (en) * 1971-06-28 1972-09-26 Gen Electric System for conducting heat from an electrode rotating in a vacuum
US3721847A (en) * 1971-11-01 1973-03-20 Tokyo Shibaura Electric Co Apparatus for producing x-rays from an electric insulator
US3892973A (en) * 1974-02-15 1975-07-01 Bell Telephone Labor Inc Mask structure for X-ray lithography
US4119879A (en) * 1977-04-18 1978-10-10 General Electric Company Graphite disc assembly for a rotating x-ray anode tube

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51103709A (ja) * 1975-03-08 1976-09-13 Kazuo Hashimoto Denwajidootaihoshikioyobisochi

Also Published As

Publication number Publication date
US4238706A (en) 1980-12-09
JPS5480097A (en) 1979-06-26

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