JPS574093B2 - - Google Patents
Info
- Publication number
- JPS574093B2 JPS574093B2 JP15190576A JP15190576A JPS574093B2 JP S574093 B2 JPS574093 B2 JP S574093B2 JP 15190576 A JP15190576 A JP 15190576A JP 15190576 A JP15190576 A JP 15190576A JP S574093 B2 JPS574093 B2 JP S574093B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Plasma Technology (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15190576A JPS5376755A (en) | 1976-12-20 | 1976-12-20 | Modulation method of plasma density |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15190576A JPS5376755A (en) | 1976-12-20 | 1976-12-20 | Modulation method of plasma density |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5376755A JPS5376755A (en) | 1978-07-07 |
JPS574093B2 true JPS574093B2 (ja) | 1982-01-25 |
Family
ID=15528748
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15190576A Granted JPS5376755A (en) | 1976-12-20 | 1976-12-20 | Modulation method of plasma density |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5376755A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61173803U (ja) * | 1985-04-19 | 1986-10-29 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04111313A (ja) * | 1990-08-31 | 1992-04-13 | Mitsubishi Electric Corp | 微細加工装置及び方法 |
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1976
- 1976-12-20 JP JP15190576A patent/JPS5376755A/ja active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61173803U (ja) * | 1985-04-19 | 1986-10-29 |
Also Published As
Publication number | Publication date |
---|---|
JPS5376755A (en) | 1978-07-07 |