JPS5740845A - Ion beam generator - Google Patents

Ion beam generator

Info

Publication number
JPS5740845A
JPS5740845A JP55117429A JP11742980A JPS5740845A JP S5740845 A JPS5740845 A JP S5740845A JP 55117429 A JP55117429 A JP 55117429A JP 11742980 A JP11742980 A JP 11742980A JP S5740845 A JPS5740845 A JP S5740845A
Authority
JP
Japan
Prior art keywords
chamber
filament
plasma
electrode
ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP55117429A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0222500B2 (enrdf_load_stackoverflow
Inventor
Toshimitsu Shirota
Hisao Wakabayashi
Yasutomo Sasanuma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Citizen Holdings Co Ltd
Citizen Watch Co Ltd
Original Assignee
Citizen Holdings Co Ltd
Citizen Watch Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Citizen Holdings Co Ltd, Citizen Watch Co Ltd filed Critical Citizen Holdings Co Ltd
Priority to JP55117429A priority Critical patent/JPS5740845A/ja
Publication of JPS5740845A publication Critical patent/JPS5740845A/ja
Publication of JPH0222500B2 publication Critical patent/JPH0222500B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/08—Ion sources; Ion guns

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
JP55117429A 1980-08-26 1980-08-26 Ion beam generator Granted JPS5740845A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55117429A JPS5740845A (en) 1980-08-26 1980-08-26 Ion beam generator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55117429A JPS5740845A (en) 1980-08-26 1980-08-26 Ion beam generator

Publications (2)

Publication Number Publication Date
JPS5740845A true JPS5740845A (en) 1982-03-06
JPH0222500B2 JPH0222500B2 (enrdf_load_stackoverflow) 1990-05-18

Family

ID=14711419

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55117429A Granted JPS5740845A (en) 1980-08-26 1980-08-26 Ion beam generator

Country Status (1)

Country Link
JP (1) JPS5740845A (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6293834A (ja) * 1985-10-18 1987-04-30 Hitachi Ltd イオン源
JPS6313248A (ja) * 1986-07-03 1988-01-20 Ulvac Corp イオン源
US4851668A (en) * 1986-04-04 1989-07-25 Hitachi, Ltd. Ion source application device
JPH02297853A (ja) * 1989-02-28 1990-12-10 Tokyo Electron Ltd 電子ビーム励起イオン源
JPH03233834A (ja) * 1990-02-07 1991-10-17 Tokyo Electron Ltd イオン発生装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5318677A (en) * 1976-08-04 1978-02-21 Sumitomo Electric Industries Process for making plastic containers

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5318677A (en) * 1976-08-04 1978-02-21 Sumitomo Electric Industries Process for making plastic containers

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6293834A (ja) * 1985-10-18 1987-04-30 Hitachi Ltd イオン源
US4851668A (en) * 1986-04-04 1989-07-25 Hitachi, Ltd. Ion source application device
JPS6313248A (ja) * 1986-07-03 1988-01-20 Ulvac Corp イオン源
JPH02297853A (ja) * 1989-02-28 1990-12-10 Tokyo Electron Ltd 電子ビーム励起イオン源
JPH03233834A (ja) * 1990-02-07 1991-10-17 Tokyo Electron Ltd イオン発生装置

Also Published As

Publication number Publication date
JPH0222500B2 (enrdf_load_stackoverflow) 1990-05-18

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