JPS574056B2 - - Google Patents
Info
- Publication number
- JPS574056B2 JPS574056B2 JP4236675A JP4236675A JPS574056B2 JP S574056 B2 JPS574056 B2 JP S574056B2 JP 4236675 A JP4236675 A JP 4236675A JP 4236675 A JP4236675 A JP 4236675A JP S574056 B2 JPS574056 B2 JP S574056B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50042366A JPS51119287A (en) | 1975-04-09 | 1975-04-09 | Recutangular-shape beam ion source |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50042366A JPS51119287A (en) | 1975-04-09 | 1975-04-09 | Recutangular-shape beam ion source |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS51119287A JPS51119287A (en) | 1976-10-19 |
| JPS574056B2 true JPS574056B2 (en) | 1982-01-23 |
Family
ID=12634026
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50042366A Granted JPS51119287A (en) | 1975-04-09 | 1975-04-09 | Recutangular-shape beam ion source |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS51119287A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60103548A (en) * | 1983-11-10 | 1985-06-07 | Akai Electric Co Ltd | Tape running device |
| JPS60157758A (en) * | 1984-01-25 | 1985-08-19 | Akai Electric Co Ltd | Tape driver |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2805009B2 (en) * | 1988-05-11 | 1998-09-30 | 株式会社日立製作所 | Plasma generator and plasma element analyzer |
| JP4289837B2 (en) | 2002-07-15 | 2009-07-01 | アプライド マテリアルズ インコーポレイテッド | Ion implantation method and method for manufacturing SOI wafer |
| JP4328067B2 (en) | 2002-07-31 | 2009-09-09 | アプライド マテリアルズ インコーポレイテッド | Ion implantation method, SOI wafer manufacturing method, and ion implantation apparatus |
-
1975
- 1975-04-09 JP JP50042366A patent/JPS51119287A/en active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60103548A (en) * | 1983-11-10 | 1985-06-07 | Akai Electric Co Ltd | Tape running device |
| JPS60157758A (en) * | 1984-01-25 | 1985-08-19 | Akai Electric Co Ltd | Tape driver |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS51119287A (en) | 1976-10-19 |