JPS5740518Y2 - - Google Patents
Info
- Publication number
- JPS5740518Y2 JPS5740518Y2 JP11956278U JP11956278U JPS5740518Y2 JP S5740518 Y2 JPS5740518 Y2 JP S5740518Y2 JP 11956278 U JP11956278 U JP 11956278U JP 11956278 U JP11956278 U JP 11956278U JP S5740518 Y2 JPS5740518 Y2 JP S5740518Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11956278U JPS5740518Y2 (en) | 1978-08-31 | 1978-08-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11956278U JPS5740518Y2 (en) | 1978-08-31 | 1978-08-31 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5537238U JPS5537238U (en) | 1980-03-10 |
| JPS5740518Y2 true JPS5740518Y2 (en) | 1982-09-06 |
Family
ID=29074950
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11956278U Expired JPS5740518Y2 (en) | 1978-08-31 | 1978-08-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5740518Y2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60140774U (en) * | 1984-02-27 | 1985-09-18 | 富士通株式会社 | Molecular beam epitaxial growth equipment |
-
1978
- 1978-08-31 JP JP11956278U patent/JPS5740518Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5537238U (en) | 1980-03-10 |