JPS5739966U - - Google Patents
Info
- Publication number
- JPS5739966U JPS5739966U JP11760980U JP11760980U JPS5739966U JP S5739966 U JPS5739966 U JP S5739966U JP 11760980 U JP11760980 U JP 11760980U JP 11760980 U JP11760980 U JP 11760980U JP S5739966 U JPS5739966 U JP S5739966U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11760980U JPS5739966U (ja) | 1980-08-20 | 1980-08-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11760980U JPS5739966U (ja) | 1980-08-20 | 1980-08-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5739966U true JPS5739966U (ja) | 1982-03-03 |
Family
ID=29478367
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11760980U Pending JPS5739966U (ja) | 1980-08-20 | 1980-08-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5739966U (ja) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6164879A (ja) * | 1984-06-28 | 1986-04-03 | ゼネラル モ−タ−ズ コ−ポレ−シヨン | 平面マグネトロン・スパッタリング陰極組立体 |
| JPS6332579U (ja) * | 1986-08-15 | 1988-03-02 | ||
| JPS6340980U (ja) * | 1986-09-03 | 1988-03-17 | ||
| JP2013129871A (ja) * | 2011-12-21 | 2013-07-04 | Sumitomo Metal Mining Co Ltd | マグネトロンスパッタリングカソード及びこれを備えたスパッタリング装置 |
-
1980
- 1980-08-20 JP JP11760980U patent/JPS5739966U/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6164879A (ja) * | 1984-06-28 | 1986-04-03 | ゼネラル モ−タ−ズ コ−ポレ−シヨン | 平面マグネトロン・スパッタリング陰極組立体 |
| JPS6332579U (ja) * | 1986-08-15 | 1988-03-02 | ||
| JPS6340980U (ja) * | 1986-09-03 | 1988-03-17 | ||
| JP2013129871A (ja) * | 2011-12-21 | 2013-07-04 | Sumitomo Metal Mining Co Ltd | マグネトロンスパッタリングカソード及びこれを備えたスパッタリング装置 |