JPS5739537A - Dust-proof cassette for photo-masking or reticule - Google Patents

Dust-proof cassette for photo-masking or reticule

Info

Publication number
JPS5739537A
JPS5739537A JP11537180A JP11537180A JPS5739537A JP S5739537 A JPS5739537 A JP S5739537A JP 11537180 A JP11537180 A JP 11537180A JP 11537180 A JP11537180 A JP 11537180A JP S5739537 A JPS5739537 A JP S5739537A
Authority
JP
Japan
Prior art keywords
masking
photo
reticule
cassette
shutting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11537180A
Other languages
Japanese (ja)
Other versions
JPS6318734B2 (en
Inventor
Nobutoshi Abe
Yukio Kakizaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NIPPON KOUGAKU KOGYO KK
Nikon Corp
Nippon Chemical Industrial Co Ltd
Original Assignee
NIPPON KOUGAKU KOGYO KK
Nippon Chemical Industrial Co Ltd
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NIPPON KOUGAKU KOGYO KK, Nippon Chemical Industrial Co Ltd, Nippon Kogaku KK filed Critical NIPPON KOUGAKU KOGYO KK
Priority to JP11537180A priority Critical patent/JPS5739537A/en
Publication of JPS5739537A publication Critical patent/JPS5739537A/en
Publication of JPS6318734B2 publication Critical patent/JPS6318734B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/66—Containers specially adapted for masks, mask blanks or pellicles; Preparation thereof

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE:To keep a photo-masking or a reticule under a practically hermetic-sealed condition, by a method wherein steps and an opening and shutting parts are provided to a cassette which has a top cover and a bottom cover, and the photo-masking or a reticule is stored by opening or shutting that parts. CONSTITUTION:Steps 3a, 3b are provided on the circumference of a bottom cover 3 except an open end 9. These steps hold a glass substrate of a photo-masking or a reticule. A top cover 2 is installed to the bottom cover 3 by hinges 7 and on its side to the open end 9 an opening and shutting part 1 is installed so as to be able to move as shown by an arrow mark B. Gutters 8 are provided on both ends of the part 1 and the part is linked with a substrate transfer equipment by a linkage part 19. Protruded parts 4, 5 are necessary to keep the cassette to the prescribed position. The glass substrate 10 is put on a transfer arm 16 and by the X- and Y-axis movement of the arm 16 the glass substrate is loaded to or unloaded from the cassette.
JP11537180A 1980-08-22 1980-08-22 Dust-proof cassette for photo-masking or reticule Granted JPS5739537A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11537180A JPS5739537A (en) 1980-08-22 1980-08-22 Dust-proof cassette for photo-masking or reticule

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11537180A JPS5739537A (en) 1980-08-22 1980-08-22 Dust-proof cassette for photo-masking or reticule

Publications (2)

Publication Number Publication Date
JPS5739537A true JPS5739537A (en) 1982-03-04
JPS6318734B2 JPS6318734B2 (en) 1988-04-20

Family

ID=14660866

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11537180A Granted JPS5739537A (en) 1980-08-22 1980-08-22 Dust-proof cassette for photo-masking or reticule

Country Status (1)

Country Link
JP (1) JPS5739537A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6067947A (en) * 1983-09-22 1985-04-18 Fuotopori Ouka Kk Method and device for exposure in plate making
JPS60247915A (en) * 1984-05-23 1985-12-07 Nippon Kogaku Kk <Nikon> Accommodating case for mask
JPH0333744A (en) * 1989-06-29 1991-02-14 Oki Electric Ind Co Ltd Photomask case
US5594236A (en) * 1993-12-14 1997-01-14 Nippondenso Co., Ltd. Sunlight sensor

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6067947A (en) * 1983-09-22 1985-04-18 Fuotopori Ouka Kk Method and device for exposure in plate making
JPS60247915A (en) * 1984-05-23 1985-12-07 Nippon Kogaku Kk <Nikon> Accommodating case for mask
JPH0333744A (en) * 1989-06-29 1991-02-14 Oki Electric Ind Co Ltd Photomask case
US5594236A (en) * 1993-12-14 1997-01-14 Nippondenso Co., Ltd. Sunlight sensor

Also Published As

Publication number Publication date
JPS6318734B2 (en) 1988-04-20

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