JPS5739514B2 - - Google Patents
Info
- Publication number
- JPS5739514B2 JPS5739514B2 JP50135273A JP13527375A JPS5739514B2 JP S5739514 B2 JPS5739514 B2 JP S5739514B2 JP 50135273 A JP50135273 A JP 50135273A JP 13527375 A JP13527375 A JP 13527375A JP S5739514 B2 JPS5739514 B2 JP S5739514B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Tests Of Electronic Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50135273A JPS5259564A (en) | 1975-11-11 | 1975-11-11 | Device for observing micro-patterns |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50135273A JPS5259564A (en) | 1975-11-11 | 1975-11-11 | Device for observing micro-patterns |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5259564A JPS5259564A (en) | 1977-05-17 |
| JPS5739514B2 true JPS5739514B2 (show.php) | 1982-08-21 |
Family
ID=15147838
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50135273A Granted JPS5259564A (en) | 1975-11-11 | 1975-11-11 | Device for observing micro-patterns |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5259564A (show.php) |
-
1975
- 1975-11-11 JP JP50135273A patent/JPS5259564A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5259564A (en) | 1977-05-17 |