JPS5738367Y2 - - Google Patents
Info
- Publication number
- JPS5738367Y2 JPS5738367Y2 JP5782978U JP5782978U JPS5738367Y2 JP S5738367 Y2 JPS5738367 Y2 JP S5738367Y2 JP 5782978 U JP5782978 U JP 5782978U JP 5782978 U JP5782978 U JP 5782978U JP S5738367 Y2 JPS5738367 Y2 JP S5738367Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Physical Vapour Deposition (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5782978U JPS5738367Y2 (zh) | 1978-04-28 | 1978-04-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5782978U JPS5738367Y2 (zh) | 1978-04-28 | 1978-04-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS54158813U JPS54158813U (zh) | 1979-11-06 |
| JPS5738367Y2 true JPS5738367Y2 (zh) | 1982-08-24 |
Family
ID=28956082
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5782978U Expired JPS5738367Y2 (zh) | 1978-04-28 | 1978-04-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5738367Y2 (zh) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1749116B1 (en) * | 2004-05-14 | 2015-03-04 | Ferrotec (USA) Corporation | Methods and apparatuses for transferring articles through a load lock chamber under vacuum |
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1978
- 1978-04-28 JP JP5782978U patent/JPS5738367Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS54158813U (zh) | 1979-11-06 |