JPS5737704U - - Google Patents

Info

Publication number
JPS5737704U
JPS5737704U JP11032880U JP11032880U JPS5737704U JP S5737704 U JPS5737704 U JP S5737704U JP 11032880 U JP11032880 U JP 11032880U JP 11032880 U JP11032880 U JP 11032880U JP S5737704 U JPS5737704 U JP S5737704U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11032880U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11032880U priority Critical patent/JPS5737704U/ja
Publication of JPS5737704U publication Critical patent/JPS5737704U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Basic Packing Technique (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)
JP11032880U 1980-07-31 1980-07-31 Pending JPS5737704U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11032880U JPS5737704U (enrdf_load_stackoverflow) 1980-07-31 1980-07-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11032880U JPS5737704U (enrdf_load_stackoverflow) 1980-07-31 1980-07-31

Publications (1)

Publication Number Publication Date
JPS5737704U true JPS5737704U (enrdf_load_stackoverflow) 1982-02-27

Family

ID=29471473

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11032880U Pending JPS5737704U (enrdf_load_stackoverflow) 1980-07-31 1980-07-31

Country Status (1)

Country Link
JP (1) JPS5737704U (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6159503U (enrdf_load_stackoverflow) * 1984-09-21 1986-04-22
JPH11114340A (ja) * 1997-09-30 1999-04-27 Samsung Electron Co Ltd 半導体装備の空気流入装置及びこれを用いた化学物汚染除去方法
JP2020196511A (ja) * 2019-06-03 2020-12-10 ストラパック株式会社 梱包機における排煙装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4121036Y1 (enrdf_load_stackoverflow) * 1965-07-08 1966-10-13
JPS4859645A (enrdf_load_stackoverflow) * 1971-11-27 1973-08-21

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4121036Y1 (enrdf_load_stackoverflow) * 1965-07-08 1966-10-13
JPS4859645A (enrdf_load_stackoverflow) * 1971-11-27 1973-08-21

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6159503U (enrdf_load_stackoverflow) * 1984-09-21 1986-04-22
JPH11114340A (ja) * 1997-09-30 1999-04-27 Samsung Electron Co Ltd 半導体装備の空気流入装置及びこれを用いた化学物汚染除去方法
JP2020196511A (ja) * 2019-06-03 2020-12-10 ストラパック株式会社 梱包機における排煙装置

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