JPS5737251U - - Google Patents
Info
- Publication number
- JPS5737251U JPS5737251U JP11469580U JP11469580U JPS5737251U JP S5737251 U JPS5737251 U JP S5737251U JP 11469580 U JP11469580 U JP 11469580U JP 11469580 U JP11469580 U JP 11469580U JP S5737251 U JPS5737251 U JP S5737251U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11469580U JPS5737251U (OSRAM) | 1980-08-13 | 1980-08-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11469580U JPS5737251U (OSRAM) | 1980-08-13 | 1980-08-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5737251U true JPS5737251U (OSRAM) | 1982-02-27 |
Family
ID=29475665
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11469580U Pending JPS5737251U (OSRAM) | 1980-08-13 | 1980-08-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5737251U (OSRAM) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004207708A (ja) * | 2002-12-10 | 2004-07-22 | Semiconductor Energy Lab Co Ltd | プラズマ処理装置及びプラズマ処理方法、並びに薄膜トランジスタの作製方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4933469A (OSRAM) * | 1972-07-28 | 1974-03-27 | ||
| JPS4957584A (OSRAM) * | 1972-10-04 | 1974-06-04 |
-
1980
- 1980-08-13 JP JP11469580U patent/JPS5737251U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4933469A (OSRAM) * | 1972-07-28 | 1974-03-27 | ||
| JPS4957584A (OSRAM) * | 1972-10-04 | 1974-06-04 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004207708A (ja) * | 2002-12-10 | 2004-07-22 | Semiconductor Energy Lab Co Ltd | プラズマ処理装置及びプラズマ処理方法、並びに薄膜トランジスタの作製方法 |