JPS5737127Y2 - - Google Patents

Info

Publication number
JPS5737127Y2
JPS5737127Y2 JP4317277U JP4317277U JPS5737127Y2 JP S5737127 Y2 JPS5737127 Y2 JP S5737127Y2 JP 4317277 U JP4317277 U JP 4317277U JP 4317277 U JP4317277 U JP 4317277U JP S5737127 Y2 JPS5737127 Y2 JP S5737127Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP4317277U
Other languages
Japanese (ja)
Other versions
JPS52135834U (de
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS52135834U publication Critical patent/JPS52135834U/ja
Application granted granted Critical
Publication of JPS5737127Y2 publication Critical patent/JPS5737127Y2/ja
Expired legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/24Base structure
    • G02B21/26Stages; Adjusting means therefor
    • GPHYSICS
    • G12INSTRUMENT DETAILS
    • G12BCONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILS OF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G12B5/00Adjusting position or attitude, e.g. level, of instruments or other apparatus, or of parts thereof; Compensating for the effects of tilting or acceleration, e.g. for optical apparatus

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Microscoopes, Condenser (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP4317277U 1976-04-12 1977-04-08 Expired JPS5737127Y2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD19231076A DD125892A1 (de) 1976-04-12 1976-04-12

Publications (2)

Publication Number Publication Date
JPS52135834U JPS52135834U (de) 1977-10-15
JPS5737127Y2 true JPS5737127Y2 (de) 1982-08-16

Family

ID=5504209

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4317277U Expired JPS5737127Y2 (de) 1976-04-12 1977-04-08

Country Status (3)

Country Link
JP (1) JPS5737127Y2 (de)
DD (1) DD125892A1 (de)
DE (1) DE2705092A1 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2810512C2 (de) * 1978-03-10 1980-03-27 Siemens Ag, 1000 Berlin Und 8000 Muenchen Ebenheitsmeßvorrichtung
EP0025122A1 (de) * 1979-08-13 1981-03-18 Alan C. Elgart Mikroskoptisch
DE19910148C2 (de) * 1999-02-26 2001-03-22 Siemens Ag Vakuumschaltkammer mit ringförmigem Isolator

Also Published As

Publication number Publication date
DD125892A1 (de) 1977-06-01
DE2705092A1 (de) 1977-11-10
JPS52135834U (de) 1977-10-15

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