JPS5736602B2 - - Google Patents

Info

Publication number
JPS5736602B2
JPS5736602B2 JP12885876A JP12885876A JPS5736602B2 JP S5736602 B2 JPS5736602 B2 JP S5736602B2 JP 12885876 A JP12885876 A JP 12885876A JP 12885876 A JP12885876 A JP 12885876A JP S5736602 B2 JPS5736602 B2 JP S5736602B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP12885876A
Other languages
Japanese (ja)
Other versions
JPS5354675A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12885876A priority Critical patent/JPS5354675A/ja
Publication of JPS5354675A publication Critical patent/JPS5354675A/ja
Publication of JPS5736602B2 publication Critical patent/JPS5736602B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Control Of Position Or Direction (AREA)
JP12885876A 1976-10-28 1976-10-28 Positioning detecting method Granted JPS5354675A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12885876A JPS5354675A (en) 1976-10-28 1976-10-28 Positioning detecting method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12885876A JPS5354675A (en) 1976-10-28 1976-10-28 Positioning detecting method

Publications (2)

Publication Number Publication Date
JPS5354675A JPS5354675A (en) 1978-05-18
JPS5736602B2 true JPS5736602B2 (OSRAM) 1982-08-05

Family

ID=14995100

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12885876A Granted JPS5354675A (en) 1976-10-28 1976-10-28 Positioning detecting method

Country Status (1)

Country Link
JP (1) JPS5354675A (OSRAM)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5854408B2 (ja) * 1977-03-03 1983-12-05 富士通株式会社 位置合せ方法
JPS61100817A (ja) * 1984-10-22 1986-05-19 Canon Inc 位置合わせ方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5425374B2 (OSRAM) * 1971-11-24 1979-08-28

Also Published As

Publication number Publication date
JPS5354675A (en) 1978-05-18

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