JPS5736282Y2 - - Google Patents
Info
- Publication number
- JPS5736282Y2 JPS5736282Y2 JP16366776U JP16366776U JPS5736282Y2 JP S5736282 Y2 JPS5736282 Y2 JP S5736282Y2 JP 16366776 U JP16366776 U JP 16366776U JP 16366776 U JP16366776 U JP 16366776U JP S5736282 Y2 JPS5736282 Y2 JP S5736282Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Special Spraying Apparatus (AREA)
- Apparatuses For Generation Of Mechanical Vibrations (AREA)
- Pressure-Spray And Ultrasonic-Wave- Spray Burners (AREA)
- Air Humidification (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16366776U JPS5736282Y2 (ja) | 1976-12-06 | 1976-12-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16366776U JPS5736282Y2 (ja) | 1976-12-06 | 1976-12-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5380113U JPS5380113U (ja) | 1978-07-04 |
| JPS5736282Y2 true JPS5736282Y2 (ja) | 1982-08-11 |
Family
ID=28771395
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16366776U Expired JPS5736282Y2 (ja) | 1976-12-06 | 1976-12-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5736282Y2 (ja) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6858586B2 (ja) * | 2017-02-16 | 2021-04-14 | 株式会社ディスコ | ウエーハ生成方法 |
| JP6858587B2 (ja) * | 2017-02-16 | 2021-04-14 | 株式会社ディスコ | ウエーハ生成方法 |
-
1976
- 1976-12-06 JP JP16366776U patent/JPS5736282Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5380113U (ja) | 1978-07-04 |