JPS5735739U - - Google Patents
Info
- Publication number
- JPS5735739U JPS5735739U JP11371280U JP11371280U JPS5735739U JP S5735739 U JPS5735739 U JP S5735739U JP 11371280 U JP11371280 U JP 11371280U JP 11371280 U JP11371280 U JP 11371280U JP S5735739 U JPS5735739 U JP S5735739U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11371280U JPS5735739U (en) | 1980-08-11 | 1980-08-11 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11371280U JPS5735739U (en) | 1980-08-11 | 1980-08-11 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5735739U true JPS5735739U (en) | 1982-02-25 |
Family
ID=29474717
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11371280U Pending JPS5735739U (en) | 1980-08-11 | 1980-08-11 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5735739U (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013119045A (en) * | 2011-12-06 | 2013-06-17 | Nissan Tanaka Corp | Method for producing mixed gas and gas mixing apparatus |
JP2015071147A (en) * | 2013-10-03 | 2015-04-16 | 東京エレクトロン株式会社 | Substrate treatment system |
-
1980
- 1980-08-11 JP JP11371280U patent/JPS5735739U/ja active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013119045A (en) * | 2011-12-06 | 2013-06-17 | Nissan Tanaka Corp | Method for producing mixed gas and gas mixing apparatus |
US9486749B2 (en) | 2011-12-06 | 2016-11-08 | Nissan Tanaka Corporation | Method for producing mixed gas and gas mixing device |
JP2015071147A (en) * | 2013-10-03 | 2015-04-16 | 東京エレクトロン株式会社 | Substrate treatment system |