JPS5735705A - Optical fiber system surface state measuring device - Google Patents

Optical fiber system surface state measuring device

Info

Publication number
JPS5735705A
JPS5735705A JP11213680A JP11213680A JPS5735705A JP S5735705 A JPS5735705 A JP S5735705A JP 11213680 A JP11213680 A JP 11213680A JP 11213680 A JP11213680 A JP 11213680A JP S5735705 A JPS5735705 A JP S5735705A
Authority
JP
Japan
Prior art keywords
optical fiber
gap
measured
displacement meter
fiber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11213680A
Other languages
Japanese (ja)
Inventor
Tatsuo Kamisaka
Takeo Kawate
Saburo Tsuruya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kobe Steel Ltd
Original Assignee
Kobe Steel Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kobe Steel Ltd filed Critical Kobe Steel Ltd
Priority to JP11213680A priority Critical patent/JPS5735705A/en
Publication of JPS5735705A publication Critical patent/JPS5735705A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/30Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/306Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

PURPOSE:To elevate the measuring accuracy, by providing a contactless type displacement meter on the tip part of an optical fiber having a light projecting element and a photodetecting element, and keeping constant a gap between the surface to be measured, and the tip of the optical fiber. CONSTITUTION:An optical fiber 1 irradiates a surface to be measured A from a projector 2 having a projecting element such as an LED, etc., and leads its reflected ray to a photodetector 3. On the tip of the fiber, for instance, is provided a contactless displacement meter 4 of an air micrometer, an ultrasonic resonance system, an electrostatic type, etc., a gap (l) to the surface to be measured A is detected, a motor is driven in accordance with a difference to a set gap l0, by a gap setting device 7, a difference detector 8 and an amplifier 9, and a position of the fiber 1 is adjusted. An output of the photodetector 3 and an output of the displacement meter 4 are inputted to an operating circuit 10, are compared with a characteristic curve F(l) of the quantity of a reflected ray, which has been provided in advance, and a corrected galss signal is outputted. In this way, the measuring accuracy is elevated by easily controlling a position of the optical fiber.
JP11213680A 1980-08-14 1980-08-14 Optical fiber system surface state measuring device Pending JPS5735705A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11213680A JPS5735705A (en) 1980-08-14 1980-08-14 Optical fiber system surface state measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11213680A JPS5735705A (en) 1980-08-14 1980-08-14 Optical fiber system surface state measuring device

Publications (1)

Publication Number Publication Date
JPS5735705A true JPS5735705A (en) 1982-02-26

Family

ID=14579108

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11213680A Pending JPS5735705A (en) 1980-08-14 1980-08-14 Optical fiber system surface state measuring device

Country Status (1)

Country Link
JP (1) JPS5735705A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61194335A (en) * 1985-02-25 1986-08-28 Hitachi Ltd Scanning type surface film analyzing method and apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61194335A (en) * 1985-02-25 1986-08-28 Hitachi Ltd Scanning type surface film analyzing method and apparatus

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