JPS5735705A - Optical fiber system surface state measuring device - Google Patents
Optical fiber system surface state measuring deviceInfo
- Publication number
- JPS5735705A JPS5735705A JP11213680A JP11213680A JPS5735705A JP S5735705 A JPS5735705 A JP S5735705A JP 11213680 A JP11213680 A JP 11213680A JP 11213680 A JP11213680 A JP 11213680A JP S5735705 A JPS5735705 A JP S5735705A
- Authority
- JP
- Japan
- Prior art keywords
- optical fiber
- gap
- measured
- displacement meter
- fiber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
- G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
PURPOSE:To elevate the measuring accuracy, by providing a contactless type displacement meter on the tip part of an optical fiber having a light projecting element and a photodetecting element, and keeping constant a gap between the surface to be measured, and the tip of the optical fiber. CONSTITUTION:An optical fiber 1 irradiates a surface to be measured A from a projector 2 having a projecting element such as an LED, etc., and leads its reflected ray to a photodetector 3. On the tip of the fiber, for instance, is provided a contactless displacement meter 4 of an air micrometer, an ultrasonic resonance system, an electrostatic type, etc., a gap (l) to the surface to be measured A is detected, a motor is driven in accordance with a difference to a set gap l0, by a gap setting device 7, a difference detector 8 and an amplifier 9, and a position of the fiber 1 is adjusted. An output of the photodetector 3 and an output of the displacement meter 4 are inputted to an operating circuit 10, are compared with a characteristic curve F(l) of the quantity of a reflected ray, which has been provided in advance, and a corrected galss signal is outputted. In this way, the measuring accuracy is elevated by easily controlling a position of the optical fiber.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11213680A JPS5735705A (en) | 1980-08-14 | 1980-08-14 | Optical fiber system surface state measuring device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11213680A JPS5735705A (en) | 1980-08-14 | 1980-08-14 | Optical fiber system surface state measuring device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5735705A true JPS5735705A (en) | 1982-02-26 |
Family
ID=14579108
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11213680A Pending JPS5735705A (en) | 1980-08-14 | 1980-08-14 | Optical fiber system surface state measuring device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5735705A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61194335A (en) * | 1985-02-25 | 1986-08-28 | Hitachi Ltd | Scanning type surface film analyzing method and apparatus |
-
1980
- 1980-08-14 JP JP11213680A patent/JPS5735705A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61194335A (en) * | 1985-02-25 | 1986-08-28 | Hitachi Ltd | Scanning type surface film analyzing method and apparatus |
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