JPS5734601U - - Google Patents

Info

Publication number
JPS5734601U
JPS5734601U JP10604080U JP10604080U JPS5734601U JP S5734601 U JPS5734601 U JP S5734601U JP 10604080 U JP10604080 U JP 10604080U JP 10604080 U JP10604080 U JP 10604080U JP S5734601 U JPS5734601 U JP S5734601U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10604080U
Other languages
Japanese (ja)
Other versions
JPS6133683Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10604080U priority Critical patent/JPS6133683Y2/ja
Publication of JPS5734601U publication Critical patent/JPS5734601U/ja
Application granted granted Critical
Publication of JPS6133683Y2 publication Critical patent/JPS6133683Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Non-Reversible Transmitting Devices (AREA)
JP10604080U 1980-07-26 1980-07-26 Expired JPS6133683Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10604080U JPS6133683Y2 (en) 1980-07-26 1980-07-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10604080U JPS6133683Y2 (en) 1980-07-26 1980-07-26

Publications (2)

Publication Number Publication Date
JPS5734601U true JPS5734601U (en) 1982-02-23
JPS6133683Y2 JPS6133683Y2 (en) 1986-10-02

Family

ID=29467394

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10604080U Expired JPS6133683Y2 (en) 1980-07-26 1980-07-26

Country Status (1)

Country Link
JP (1) JPS6133683Y2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010182683A (en) * 2002-05-20 2010-08-19 Mks Instruments Inc Method and apparatus for vhf plasma processing with load mismatch reliability and stability

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010182683A (en) * 2002-05-20 2010-08-19 Mks Instruments Inc Method and apparatus for vhf plasma processing with load mismatch reliability and stability

Also Published As

Publication number Publication date
JPS6133683Y2 (en) 1986-10-02

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