JPS5734601U - - Google Patents
Info
- Publication number
- JPS5734601U JPS5734601U JP10604080U JP10604080U JPS5734601U JP S5734601 U JPS5734601 U JP S5734601U JP 10604080 U JP10604080 U JP 10604080U JP 10604080 U JP10604080 U JP 10604080U JP S5734601 U JPS5734601 U JP S5734601U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Non-Reversible Transmitting Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10604080U JPS6133683Y2 (en) | 1980-07-26 | 1980-07-26 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10604080U JPS6133683Y2 (en) | 1980-07-26 | 1980-07-26 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5734601U true JPS5734601U (en) | 1982-02-23 |
JPS6133683Y2 JPS6133683Y2 (en) | 1986-10-02 |
Family
ID=29467394
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10604080U Expired JPS6133683Y2 (en) | 1980-07-26 | 1980-07-26 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6133683Y2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010182683A (en) * | 2002-05-20 | 2010-08-19 | Mks Instruments Inc | Method and apparatus for vhf plasma processing with load mismatch reliability and stability |
-
1980
- 1980-07-26 JP JP10604080U patent/JPS6133683Y2/ja not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010182683A (en) * | 2002-05-20 | 2010-08-19 | Mks Instruments Inc | Method and apparatus for vhf plasma processing with load mismatch reliability and stability |
Also Published As
Publication number | Publication date |
---|---|
JPS6133683Y2 (en) | 1986-10-02 |