JPS5733857B2 - - Google Patents

Info

Publication number
JPS5733857B2
JPS5733857B2 JP8973275A JP8973275A JPS5733857B2 JP S5733857 B2 JPS5733857 B2 JP S5733857B2 JP 8973275 A JP8973275 A JP 8973275A JP 8973275 A JP8973275 A JP 8973275A JP S5733857 B2 JPS5733857 B2 JP S5733857B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP8973275A
Other languages
Japanese (ja)
Other versions
JPS5213787A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP50089732A priority Critical patent/JPS5213787A/ja
Publication of JPS5213787A publication Critical patent/JPS5213787A/ja
Publication of JPS5733857B2 publication Critical patent/JPS5733857B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Element Separation (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
JP50089732A 1975-07-23 1975-07-23 Production method of mos-type integrated circuit Granted JPS5213787A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50089732A JPS5213787A (en) 1975-07-23 1975-07-23 Production method of mos-type integrated circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50089732A JPS5213787A (en) 1975-07-23 1975-07-23 Production method of mos-type integrated circuit

Publications (2)

Publication Number Publication Date
JPS5213787A JPS5213787A (en) 1977-02-02
JPS5733857B2 true JPS5733857B2 (cs) 1982-07-20

Family

ID=13978924

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50089732A Granted JPS5213787A (en) 1975-07-23 1975-07-23 Production method of mos-type integrated circuit

Country Status (1)

Country Link
JP (1) JPS5213787A (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0168453A1 (de) * 1984-01-25 1986-01-22 Hölter, Heinz, Dipl.-Ing. Verfahren zur abscheidung von stickstoffoxiden und schwefeloxiden sowie gegebenenfalls anderen schadstoffen aus den rauchgasen von verbrennungsanlagen

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5084185A (cs) * 1973-11-27 1975-07-07
JPS5197388A (en) * 1975-02-24 1976-08-26 Sohogata mos denkaikokatoranjisutanoseizohoho

Also Published As

Publication number Publication date
JPS5213787A (en) 1977-02-02

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