JPS5732853U - - Google Patents
Info
- Publication number
- JPS5732853U JPS5732853U JP10951180U JP10951180U JPS5732853U JP S5732853 U JPS5732853 U JP S5732853U JP 10951180 U JP10951180 U JP 10951180U JP 10951180 U JP10951180 U JP 10951180U JP S5732853 U JPS5732853 U JP S5732853U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10951180U JPS6116528Y2 (enExample) | 1980-08-01 | 1980-08-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10951180U JPS6116528Y2 (enExample) | 1980-08-01 | 1980-08-01 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5732853U true JPS5732853U (enExample) | 1982-02-20 |
| JPS6116528Y2 JPS6116528Y2 (enExample) | 1986-05-21 |
Family
ID=29470705
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10951180U Expired JPS6116528Y2 (enExample) | 1980-08-01 | 1980-08-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6116528Y2 (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6039059A (en) | 1996-09-30 | 2000-03-21 | Verteq, Inc. | Wafer cleaning system |
-
1980
- 1980-08-01 JP JP10951180U patent/JPS6116528Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6116528Y2 (enExample) | 1986-05-21 |