JPS5732629Y2 - - Google Patents

Info

Publication number
JPS5732629Y2
JPS5732629Y2 JP1978129275U JP12927578U JPS5732629Y2 JP S5732629 Y2 JPS5732629 Y2 JP S5732629Y2 JP 1978129275 U JP1978129275 U JP 1978129275U JP 12927578 U JP12927578 U JP 12927578U JP S5732629 Y2 JPS5732629 Y2 JP S5732629Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1978129275U
Other languages
Japanese (ja)
Other versions
JPS5558082U (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1978129275U priority Critical patent/JPS5732629Y2/ja
Publication of JPS5558082U publication Critical patent/JPS5558082U/ja
Application granted granted Critical
Publication of JPS5732629Y2 publication Critical patent/JPS5732629Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Details Of Measuring And Other Instruments (AREA)
  • Casings For Electric Apparatus (AREA)
JP1978129275U 1978-09-20 1978-09-20 Expired JPS5732629Y2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1978129275U JPS5732629Y2 (cs) 1978-09-20 1978-09-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1978129275U JPS5732629Y2 (cs) 1978-09-20 1978-09-20

Publications (2)

Publication Number Publication Date
JPS5558082U JPS5558082U (cs) 1980-04-19
JPS5732629Y2 true JPS5732629Y2 (cs) 1982-07-17

Family

ID=29093770

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1978129275U Expired JPS5732629Y2 (cs) 1978-09-20 1978-09-20

Country Status (1)

Country Link
JP (1) JPS5732629Y2 (cs)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7635263B2 (en) 2005-01-31 2009-12-22 Molecular Imprints, Inc. Chucking system comprising an array of fluid chambers
US7636999B2 (en) 2005-01-31 2009-12-29 Molecular Imprints, Inc. Method of retaining a substrate to a wafer chuck
US7641840B2 (en) 2002-11-13 2010-01-05 Molecular Imprints, Inc. Method for expelling gas positioned between a substrate and a mold

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS437607Y1 (cs) * 1964-12-11 1968-04-05

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7641840B2 (en) 2002-11-13 2010-01-05 Molecular Imprints, Inc. Method for expelling gas positioned between a substrate and a mold
US7635263B2 (en) 2005-01-31 2009-12-22 Molecular Imprints, Inc. Chucking system comprising an array of fluid chambers
US7636999B2 (en) 2005-01-31 2009-12-29 Molecular Imprints, Inc. Method of retaining a substrate to a wafer chuck

Also Published As

Publication number Publication date
JPS5558082U (cs) 1980-04-19

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