JPS5732625A - Chromatic aberration compensating mechanism for projection lens - Google Patents

Chromatic aberration compensating mechanism for projection lens

Info

Publication number
JPS5732625A
JPS5732625A JP9515580A JP9515580A JPS5732625A JP S5732625 A JPS5732625 A JP S5732625A JP 9515580 A JP9515580 A JP 9515580A JP 9515580 A JP9515580 A JP 9515580A JP S5732625 A JPS5732625 A JP S5732625A
Authority
JP
Japan
Prior art keywords
projection lens
chromatic aberration
compensating mechanism
aberration compensating
chromatic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9515580A
Other languages
Japanese (ja)
Inventor
Dasuteisu Rainaa
Hetsuse Rainaa
Kuringenfueruto Deiitomaa
Zaide Borufugangu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jenoptik AG
Original Assignee
Carl Zeiss Jena GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss Jena GmbH filed Critical Carl Zeiss Jena GmbH
Priority to JP9515580A priority Critical patent/JPS5732625A/en
Publication of JPS5732625A publication Critical patent/JPS5732625A/en
Pending legal-status Critical Current

Links

Landscapes

  • Projection-Type Copiers In General (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP9515580A 1980-07-14 1980-07-14 Chromatic aberration compensating mechanism for projection lens Pending JPS5732625A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9515580A JPS5732625A (en) 1980-07-14 1980-07-14 Chromatic aberration compensating mechanism for projection lens

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9515580A JPS5732625A (en) 1980-07-14 1980-07-14 Chromatic aberration compensating mechanism for projection lens

Publications (1)

Publication Number Publication Date
JPS5732625A true JPS5732625A (en) 1982-02-22

Family

ID=14129891

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9515580A Pending JPS5732625A (en) 1980-07-14 1980-07-14 Chromatic aberration compensating mechanism for projection lens

Country Status (1)

Country Link
JP (1) JPS5732625A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5464130A (en) * 1992-09-03 1995-11-07 Yoshino Kogyosho Co., Ltd. Piston of pump section of trigger-type liquid dispenser

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5570025A (en) * 1978-10-19 1980-05-27 Censor Patent Versuch Device for projecting and printing mark of mask on semiconductor substrate

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5570025A (en) * 1978-10-19 1980-05-27 Censor Patent Versuch Device for projecting and printing mark of mask on semiconductor substrate

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5464130A (en) * 1992-09-03 1995-11-07 Yoshino Kogyosho Co., Ltd. Piston of pump section of trigger-type liquid dispenser

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