JPS5732436Y2 - - Google Patents

Info

Publication number
JPS5732436Y2
JPS5732436Y2 JP1978021348U JP2134878U JPS5732436Y2 JP S5732436 Y2 JPS5732436 Y2 JP S5732436Y2 JP 1978021348 U JP1978021348 U JP 1978021348U JP 2134878 U JP2134878 U JP 2134878U JP S5732436 Y2 JPS5732436 Y2 JP S5732436Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1978021348U
Other languages
Japanese (ja)
Other versions
JPS54124592U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1978021348U priority Critical patent/JPS5732436Y2/ja
Publication of JPS54124592U publication Critical patent/JPS54124592U/ja
Application granted granted Critical
Publication of JPS5732436Y2 publication Critical patent/JPS5732436Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP1978021348U 1978-02-21 1978-02-21 Expired JPS5732436Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1978021348U JPS5732436Y2 (enrdf_load_stackoverflow) 1978-02-21 1978-02-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1978021348U JPS5732436Y2 (enrdf_load_stackoverflow) 1978-02-21 1978-02-21

Publications (2)

Publication Number Publication Date
JPS54124592U JPS54124592U (enrdf_load_stackoverflow) 1979-08-31
JPS5732436Y2 true JPS5732436Y2 (enrdf_load_stackoverflow) 1982-07-16

Family

ID=28854044

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1978021348U Expired JPS5732436Y2 (enrdf_load_stackoverflow) 1978-02-21 1978-02-21

Country Status (1)

Country Link
JP (1) JPS5732436Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7262260B2 (ja) * 2018-03-30 2023-04-21 セーレン株式会社 欠陥検査装置、及び欠陥検査方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4951995A (enrdf_load_stackoverflow) * 1972-09-16 1974-05-20

Also Published As

Publication number Publication date
JPS54124592U (enrdf_load_stackoverflow) 1979-08-31

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