JPS573240U - - Google Patents
Info
- Publication number
- JPS573240U JPS573240U JP7866780U JP7866780U JPS573240U JP S573240 U JPS573240 U JP S573240U JP 7866780 U JP7866780 U JP 7866780U JP 7866780 U JP7866780 U JP 7866780U JP S573240 U JPS573240 U JP S573240U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7866780U JPS573240U (en) | 1980-06-06 | 1980-06-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7866780U JPS573240U (en) | 1980-06-06 | 1980-06-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS573240U true JPS573240U (en) | 1982-01-08 |
Family
ID=29441172
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7866780U Pending JPS573240U (en) | 1980-06-06 | 1980-06-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS573240U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59151438U (en) * | 1983-03-29 | 1984-10-11 | 日本電子株式会社 | Material feeding equipment such as electron beam exposure equipment |
-
1980
- 1980-06-06 JP JP7866780U patent/JPS573240U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59151438U (en) * | 1983-03-29 | 1984-10-11 | 日本電子株式会社 | Material feeding equipment such as electron beam exposure equipment |