JPS573213B2 - - Google Patents
Info
- Publication number
- JPS573213B2 JPS573213B2 JP10282576A JP10282576A JPS573213B2 JP S573213 B2 JPS573213 B2 JP S573213B2 JP 10282576 A JP10282576 A JP 10282576A JP 10282576 A JP10282576 A JP 10282576A JP S573213 B2 JPS573213 B2 JP S573213B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10282576A JPS5328377A (en) | 1976-08-27 | 1976-08-27 | Method of ion etching |
| US05/924,066 US4233109A (en) | 1976-01-16 | 1978-07-12 | Dry etching method |
| US06/166,700 US4371412A (en) | 1976-01-16 | 1980-07-03 | Dry etching apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10282576A JPS5328377A (en) | 1976-08-27 | 1976-08-27 | Method of ion etching |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5328377A JPS5328377A (en) | 1978-03-16 |
| JPS573213B2 true JPS573213B2 (cs) | 1982-01-20 |
Family
ID=14337788
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10282576A Granted JPS5328377A (en) | 1976-01-16 | 1976-08-27 | Method of ion etching |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5328377A (cs) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5781967A (en) * | 1980-11-06 | 1982-05-22 | Matsushita Electric Ind Co Ltd | Feed roller for planetary system electrode wire feeder |
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1976
- 1976-08-27 JP JP10282576A patent/JPS5328377A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5328377A (en) | 1978-03-16 |