JPS5731654B2 - - Google Patents
Info
- Publication number
- JPS5731654B2 JPS5731654B2 JP10114876A JP10114876A JPS5731654B2 JP S5731654 B2 JPS5731654 B2 JP S5731654B2 JP 10114876 A JP10114876 A JP 10114876A JP 10114876 A JP10114876 A JP 10114876A JP S5731654 B2 JPS5731654 B2 JP S5731654B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Welding Or Cutting Using Electron Beams (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10114876A JPS5327197A (en) | 1976-08-26 | 1976-08-26 | Ion etching device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10114876A JPS5327197A (en) | 1976-08-26 | 1976-08-26 | Ion etching device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5327197A JPS5327197A (en) | 1978-03-14 |
| JPS5731654B2 true JPS5731654B2 (enExample) | 1982-07-06 |
Family
ID=14292973
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10114876A Granted JPS5327197A (en) | 1976-08-26 | 1976-08-26 | Ion etching device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5327197A (enExample) |
-
1976
- 1976-08-26 JP JP10114876A patent/JPS5327197A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5327197A (en) | 1978-03-14 |