JPS5730295B2 - - Google Patents

Info

Publication number
JPS5730295B2
JPS5730295B2 JP2935774A JP2935774A JPS5730295B2 JP S5730295 B2 JPS5730295 B2 JP S5730295B2 JP 2935774 A JP2935774 A JP 2935774A JP 2935774 A JP2935774 A JP 2935774A JP S5730295 B2 JPS5730295 B2 JP S5730295B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP2935774A
Other languages
Japanese (ja)
Other versions
JPS50122880A (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2935774A priority Critical patent/JPS5730295B2/ja
Publication of JPS50122880A publication Critical patent/JPS50122880A/ja
Publication of JPS5730295B2 publication Critical patent/JPS5730295B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Image Analysis (AREA)
  • Image Processing (AREA)
  • Wire Bonding (AREA)
  • Control Of Position Or Direction (AREA)
JP2935774A 1974-03-13 1974-03-13 Expired JPS5730295B2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2935774A JPS5730295B2 (cs) 1974-03-13 1974-03-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2935774A JPS5730295B2 (cs) 1974-03-13 1974-03-13

Publications (2)

Publication Number Publication Date
JPS50122880A JPS50122880A (cs) 1975-09-26
JPS5730295B2 true JPS5730295B2 (cs) 1982-06-28

Family

ID=12273935

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2935774A Expired JPS5730295B2 (cs) 1974-03-13 1974-03-13

Country Status (1)

Country Link
JP (1) JPS5730295B2 (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0249990U (cs) * 1988-09-29 1990-04-06

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5364180A (en) * 1976-11-19 1978-06-08 Sanyo Electric Co Device for correcting position
JPS57145066U (cs) * 1981-03-06 1982-09-11
JPS60214910A (ja) * 1985-03-11 1985-10-28 株式会社日立製作所 ダイシング装置
JPS6235640A (ja) * 1985-08-09 1987-02-16 Nec Kyushu Ltd 半導体基板のプリアライメント機構
JP4702888B2 (ja) * 2006-02-17 2011-06-15 株式会社山武 位置検出方法および位置合わせ方法
JP4822342B2 (ja) * 2006-09-26 2011-11-24 株式会社山武 位置検出方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0249990U (cs) * 1988-09-29 1990-04-06

Also Published As

Publication number Publication date
JPS50122880A (cs) 1975-09-26

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