JPS5730048Y2 - - Google Patents

Info

Publication number
JPS5730048Y2
JPS5730048Y2 JP9071380U JP9071380U JPS5730048Y2 JP S5730048 Y2 JPS5730048 Y2 JP S5730048Y2 JP 9071380 U JP9071380 U JP 9071380U JP 9071380 U JP9071380 U JP 9071380U JP S5730048 Y2 JPS5730048 Y2 JP S5730048Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9071380U
Other languages
Japanese (ja)
Other versions
JPS5713158U (ko
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9071380U priority Critical patent/JPS5730048Y2/ja
Publication of JPS5713158U publication Critical patent/JPS5713158U/ja
Application granted granted Critical
Publication of JPS5730048Y2 publication Critical patent/JPS5730048Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Polishing Bodies And Polishing Tools (AREA)
JP9071380U 1980-06-30 1980-06-30 Expired JPS5730048Y2 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9071380U JPS5730048Y2 (ko) 1980-06-30 1980-06-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9071380U JPS5730048Y2 (ko) 1980-06-30 1980-06-30

Publications (2)

Publication Number Publication Date
JPS5713158U JPS5713158U (ko) 1982-01-23
JPS5730048Y2 true JPS5730048Y2 (ko) 1982-07-01

Family

ID=29452710

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9071380U Expired JPS5730048Y2 (ko) 1980-06-30 1980-06-30

Country Status (1)

Country Link
JP (1) JPS5730048Y2 (ko)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101204363B1 (ko) 2011-03-08 2012-11-26 신한다이아몬드공업 주식회사 Cmp 패드 컨디셔너

Also Published As

Publication number Publication date
JPS5713158U (ko) 1982-01-23

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