JPS5729043B2 - - Google Patents
Info
- Publication number
- JPS5729043B2 JPS5729043B2 JP14611674A JP14611674A JPS5729043B2 JP S5729043 B2 JPS5729043 B2 JP S5729043B2 JP 14611674 A JP14611674 A JP 14611674A JP 14611674 A JP14611674 A JP 14611674A JP S5729043 B2 JPS5729043 B2 JP S5729043B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14611674A JPS5171674A (ja) | 1974-12-18 | 1974-12-18 | Handotaisochinoseizohoho |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14611674A JPS5171674A (ja) | 1974-12-18 | 1974-12-18 | Handotaisochinoseizohoho |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5171674A JPS5171674A (ja) | 1976-06-21 |
| JPS5729043B2 true JPS5729043B2 (enExample) | 1982-06-21 |
Family
ID=15400509
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14611674A Granted JPS5171674A (ja) | 1974-12-18 | 1974-12-18 | Handotaisochinoseizohoho |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5171674A (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS637625A (ja) * | 1986-06-27 | 1988-01-13 | Toshiba Ceramics Co Ltd | 半導体ウエハ−の熱処理装置 |
| JP2879047B2 (ja) * | 1989-04-14 | 1999-04-05 | 東京エレクトロン株式会社 | 熱処理装置及び熱処理方法 |
| KR950006969B1 (ko) * | 1992-01-06 | 1995-06-26 | 삼성전자주식회사 | 반도체 제조용 튜브장치 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50110569A (enExample) * | 1974-02-07 | 1975-08-30 |
-
1974
- 1974-12-18 JP JP14611674A patent/JPS5171674A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5171674A (ja) | 1976-06-21 |