JPS5728885B2 - - Google Patents

Info

Publication number
JPS5728885B2
JPS5728885B2 JP10606573A JP10606573A JPS5728885B2 JP S5728885 B2 JPS5728885 B2 JP S5728885B2 JP 10606573 A JP10606573 A JP 10606573A JP 10606573 A JP10606573 A JP 10606573A JP S5728885 B2 JPS5728885 B2 JP S5728885B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP10606573A
Other versions
JPS5053060A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS5053060A publication Critical patent/JPS5053060A/ja
Publication of JPS5728885B2 publication Critical patent/JPS5728885B2/ja
Expired legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/50Optics for phase object visualisation
JP10606573A 1972-10-30 1973-09-21 Expired JPS5728885B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US00302337A US3815998A (en) 1972-10-30 1972-10-30 Surface contrast system and method

Publications (2)

Publication Number Publication Date
JPS5053060A JPS5053060A (ja) 1975-05-10
JPS5728885B2 true JPS5728885B2 (ja) 1982-06-19

Family

ID=23167334

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10606573A Expired JPS5728885B2 (ja) 1972-10-30 1973-09-21

Country Status (7)

Country Link
US (1) US3815998A (ja)
JP (1) JPS5728885B2 (ja)
CA (1) CA991844A (ja)
DE (1) DE2354141A1 (ja)
FR (1) FR2217670B1 (ja)
GB (1) GB1449246A (ja)
IT (1) IT1001555B (ja)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1492114A (en) * 1975-01-31 1977-11-16 Coal Ind Measurement of flow of particulate material
US4215939A (en) * 1977-12-22 1980-08-05 Owens-Illinois, Inc. Glue drop detector
US4339745A (en) * 1980-05-14 1982-07-13 General Electric Company Optical character recognition
US4390277A (en) * 1980-07-31 1983-06-28 Mcdonnell Douglas Corporation Flat sheet scatterometer
US4340300A (en) * 1980-08-11 1982-07-20 Siemens Corporation Input sensor unit for a fingerprint identification system
US4547073A (en) * 1981-02-17 1985-10-15 Matsushita Electric Industrial Co., Ltd. Surface examining apparatus and method
JPS6313446Y2 (ja) * 1981-02-17 1988-04-16
US4854708A (en) * 1987-01-13 1989-08-08 Rotlex Optics Ltd. Optical examination apparatus particularly useful as a Fizeau interferometer and schlieren device
US5075562A (en) * 1990-09-20 1991-12-24 Eastman Kodak Company Method and apparatus for absolute Moire distance measurements using a grating printed on or attached to a surface
US5075560A (en) * 1990-09-20 1991-12-24 Eastman Kodak Company Moire distance measurements using a grating printed on or attached to a surface
JPH06317532A (ja) * 1993-04-30 1994-11-15 Kazumi Haga 検査装置
JP3385442B2 (ja) * 1994-05-31 2003-03-10 株式会社ニュークリエイション 検査用光学系および検査装置
JP3404134B2 (ja) * 1994-06-21 2003-05-06 株式会社ニュークリエイション 検査装置
US5523846A (en) * 1994-11-21 1996-06-04 New Creation Co., Ltd. Apparatus for detecting marks formed on a sample surface
US5737074A (en) * 1995-12-05 1998-04-07 New Creation Co., Ltd. Surface inspection method and apparatus
US5686987A (en) * 1995-12-29 1997-11-11 Orfield Associates, Inc. Methods for assessing visual tasks to establish desirable lighting and viewing conditions for performance of tasks; apparatus; and, applications
JP4105256B2 (ja) * 1997-07-29 2008-06-25 株式会社ナノシステムソリューションズ 光照射装置及び表面検査装置
JP4303120B2 (ja) * 2001-12-17 2009-07-29 サイバーオプティクス セミコンダクタ インコーポレイテッド 半導体ウェハキャリア用マッピングセンサ
DE102005061834B4 (de) * 2005-12-23 2007-11-08 Ioss Intelligente Optische Sensoren & Systeme Gmbh Vorrichtung und Verfahren zum optischen Prüfen einer Oberfläche
DE102006054148B4 (de) * 2006-11-16 2009-07-09 Ioss Intelligente Optische Sensoren & Systeme Gmbh Vorrichtung zum optischen Erfassen von Störungen an Körpern aus transparentem Material mit wenigstens einer ebenen Grenzfläche optischer Güte
KR101114362B1 (ko) * 2009-03-09 2012-02-14 주식회사 쓰리비 시스템 결점검사를 위한 검사장치
US10509931B1 (en) 2018-07-03 2019-12-17 Hand Held Products, Inc. Methods, systems, and apparatuses for scanning and decoding direct part marking indicia

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2604809A (en) * 1948-06-01 1952-07-29 Mitchell Reginald Fawn Optical means for evaluating surface finish by measurement of differential light scattering in a schlieren type optical system
NL257509A (ja) * 1959-11-02
FR1504402A (fr) * 1963-06-05 1967-12-08 Onera (Off Nat Aerospatiale) Perfectionnements à la strioscopie
FR1543704A (fr) * 1966-11-10 1968-10-25 Leitz Ernst Gmbh Procédé optique de détermination des défauts géométriques d'une surface de forme imposée, et dispositif pour la mise en oeuvre de ce procédé

Also Published As

Publication number Publication date
DE2354141A1 (de) 1974-05-09
IT1001555B (it) 1976-04-30
GB1449246A (en) 1976-09-15
FR2217670B1 (ja) 1976-10-01
JPS5053060A (ja) 1975-05-10
FR2217670A1 (ja) 1974-09-06
CA991844A (en) 1976-06-29
DE2354141C2 (ja) 1987-04-23
US3815998A (en) 1974-06-11

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