JPS5728393Y2 - - Google Patents

Info

Publication number
JPS5728393Y2
JPS5728393Y2 JP1975127896U JP12789675U JPS5728393Y2 JP S5728393 Y2 JPS5728393 Y2 JP S5728393Y2 JP 1975127896 U JP1975127896 U JP 1975127896U JP 12789675 U JP12789675 U JP 12789675U JP S5728393 Y2 JPS5728393 Y2 JP S5728393Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1975127896U
Other languages
Japanese (ja)
Other versions
JPS5242050U (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1975127896U priority Critical patent/JPS5728393Y2/ja
Publication of JPS5242050U publication Critical patent/JPS5242050U/ja
Application granted granted Critical
Publication of JPS5728393Y2 publication Critical patent/JPS5728393Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Sliding Valves (AREA)
JP1975127896U 1975-09-19 1975-09-19 Expired JPS5728393Y2 (https=)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1975127896U JPS5728393Y2 (https=) 1975-09-19 1975-09-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1975127896U JPS5728393Y2 (https=) 1975-09-19 1975-09-19

Publications (2)

Publication Number Publication Date
JPS5242050U JPS5242050U (https=) 1977-03-25
JPS5728393Y2 true JPS5728393Y2 (https=) 1982-06-21

Family

ID=28608275

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1975127896U Expired JPS5728393Y2 (https=) 1975-09-19 1975-09-19

Country Status (1)

Country Link
JP (1) JPS5728393Y2 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59192006U (ja) * 1983-06-08 1984-12-20 松下電器産業株式会社 ごみ等の収容装置
JPH0670475B2 (ja) * 1986-08-30 1994-09-07 日電アネルバ株式会社 真空容器のゲートバルブ
JP2002358920A (ja) * 2001-06-01 2002-12-13 Ulvac Japan Ltd 荷電粒子線装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4430433Y1 (https=) * 1965-04-15 1969-12-15

Also Published As

Publication number Publication date
JPS5242050U (https=) 1977-03-25

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