JPS5728220A - Spectrometer for scanning type electronic microscope - Google Patents

Spectrometer for scanning type electronic microscope

Info

Publication number
JPS5728220A
JPS5728220A JP9454581A JP9454581A JPS5728220A JP S5728220 A JPS5728220 A JP S5728220A JP 9454581 A JP9454581 A JP 9454581A JP 9454581 A JP9454581 A JP 9454581A JP S5728220 A JPS5728220 A JP S5728220A
Authority
JP
Japan
Prior art keywords
spectrometer
type electronic
scanning type
electronic microscope
microscope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9454581A
Other languages
English (en)
Inventor
Bobuino Jiyatsukii
Sumo Jiyatsuku
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of JPS5728220A publication Critical patent/JPS5728220A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical or photographic arrangements associated with the tube
    • H01J37/226—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object
    • H01J37/228—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object whereby illumination and light collection take place in the same area of the discharge
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/28—Scanning microscopes
    • H01J2237/2803—Scanning microscopes characterised by the imaging method
    • H01J2237/2808—Cathodoluminescence

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Microscoopes, Condenser (AREA)
JP9454581A 1980-06-19 1981-06-18 Spectrometer for scanning type electronic microscope Pending JPS5728220A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8013619A FR2485189A1 (fr) 1980-06-19 1980-06-19 Spectroscope optique a reseaux et miroirs pour microscope electronique a balyage

Publications (1)

Publication Number Publication Date
JPS5728220A true JPS5728220A (en) 1982-02-15

Family

ID=9243268

Family Applications (2)

Application Number Title Priority Date Filing Date
JP9454581A Pending JPS5728220A (en) 1980-06-19 1981-06-18 Spectrometer for scanning type electronic microscope
JP1986167394U Expired JPS6315793Y2 (ja) 1980-06-19 1986-10-30

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP1986167394U Expired JPS6315793Y2 (ja) 1980-06-19 1986-10-30

Country Status (4)

Country Link
US (1) US4410272A (ja)
JP (2) JPS5728220A (ja)
FR (1) FR2485189A1 (ja)
GB (1) GB2079486B (ja)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3729846A1 (de) * 1987-09-05 1989-03-23 Zeiss Carl Fa Kathodolumineszenzdetektor
US5412211A (en) * 1993-07-30 1995-05-02 Electroscan Corporation Environmental scanning electron microscope
US5362964A (en) * 1993-07-30 1994-11-08 Electroscan Corporation Environmental scanning electron microscope
JP2875940B2 (ja) * 1993-08-26 1999-03-31 株式会社日立製作所 試料の高さ計測手段を備えた電子ビーム装置
WO1999058939A1 (en) * 1998-05-09 1999-11-18 Renishaw Plc Electron microscope and spectroscopy system
US6885445B2 (en) 1998-05-09 2005-04-26 Renishaw Plc Electron microscope and spectroscopy system
JP4587887B2 (ja) * 2005-06-29 2010-11-24 株式会社堀場製作所 試料測定装置
US7773300B2 (en) * 2006-05-12 2010-08-10 Semrock, Inc. Multiphoton fluorescence filters
US8958156B1 (en) 2007-05-30 2015-02-17 Semrock, Inc. Interference filter for non-zero angle of incidence spectroscopy
US9354370B1 (en) 2007-09-25 2016-05-31 Semrock, Inc. Optical thin-film notch filter with very wide pass band regions
US8879150B1 (en) 2009-03-20 2014-11-04 Semrock, Inc. Optical thin-film polarizing bandpass filter
US8441710B2 (en) * 2010-01-08 2013-05-14 Semrock, Inc. Tunable thin-film filter
US8059327B1 (en) 2010-04-29 2011-11-15 Semrock, Inc. Variable spectral filter apparatus
US9304237B1 (en) 2012-12-10 2016-04-05 Semrock, Inc. Tunable band-pass filter
CN113702357B (zh) * 2021-09-24 2024-04-12 中国科学院上海光学精密机械研究所 基于随机光栅压缩感知的激光诱导击穿光谱装置及测量方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5313399U (ja) * 1976-07-16 1978-02-03

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1238768A (fr) * 1959-05-13 1960-08-19 Commissariat Energie Atomique Perfectionnements apportés aux moyens pour effectuer des analyses spectrales, en particulier dans l'ultraviolet lointain
US3144498A (en) * 1961-02-23 1964-08-11 Perkin Elmer Corp High resolution filter-grating spectrometer
US3659945A (en) * 1969-11-19 1972-05-02 Perkin Elmer Corp Scanning monochromators
US3775620A (en) * 1972-08-24 1973-11-27 Mc Donnell Douglas Corp Radiation source simulation means
FR2245937A1 (en) * 1973-10-01 1975-04-25 Beauvineau Jacky Study of luminescent materials by electron beam microscope - involves spectroscope with slit adjustable in height and width

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5313399U (ja) * 1976-07-16 1978-02-03

Also Published As

Publication number Publication date
GB2079486A (en) 1982-01-20
JPS6315793Y2 (ja) 1988-05-06
US4410272A (en) 1983-10-18
GB2079486B (en) 1984-04-26
JPS6276624U (ja) 1987-05-16
FR2485189B1 (ja) 1984-03-16
FR2485189A1 (fr) 1981-12-24

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