JPS5727150Y2 - - Google Patents
Info
- Publication number
- JPS5727150Y2 JPS5727150Y2 JP1977178588U JP17858877U JPS5727150Y2 JP S5727150 Y2 JPS5727150 Y2 JP S5727150Y2 JP 1977178588 U JP1977178588 U JP 1977178588U JP 17858877 U JP17858877 U JP 17858877U JP S5727150 Y2 JPS5727150 Y2 JP S5727150Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1977178588U JPS5727150Y2 (en:Method) | 1977-12-27 | 1977-12-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1977178588U JPS5727150Y2 (en:Method) | 1977-12-27 | 1977-12-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS54101977U JPS54101977U (en:Method) | 1979-07-18 |
| JPS5727150Y2 true JPS5727150Y2 (en:Method) | 1982-06-14 |
Family
ID=29189201
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1977178588U Expired JPS5727150Y2 (en:Method) | 1977-12-27 | 1977-12-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5727150Y2 (en:Method) |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5531614B2 (en:Method) * | 1972-10-04 | 1980-08-19 | ||
| JPS50112070U (en:Method) * | 1974-02-22 | 1975-09-12 |
-
1977
- 1977-12-27 JP JP1977178588U patent/JPS5727150Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS54101977U (en:Method) | 1979-07-18 |