JPS5726405B2 - - Google Patents

Info

Publication number
JPS5726405B2
JPS5726405B2 JP8026475A JP8026475A JPS5726405B2 JP S5726405 B2 JPS5726405 B2 JP S5726405B2 JP 8026475 A JP8026475 A JP 8026475A JP 8026475 A JP8026475 A JP 8026475A JP S5726405 B2 JPS5726405 B2 JP S5726405B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP8026475A
Other languages
Japanese (ja)
Other versions
JPS524328A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP50080264A priority Critical patent/JPS524328A/ja
Publication of JPS524328A publication Critical patent/JPS524328A/ja
Publication of JPS5726405B2 publication Critical patent/JPS5726405B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
  • Projection-Type Copiers In General (AREA)
JP50080264A 1975-06-27 1975-06-27 Device for making figures Granted JPS524328A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50080264A JPS524328A (en) 1975-06-27 1975-06-27 Device for making figures

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50080264A JPS524328A (en) 1975-06-27 1975-06-27 Device for making figures

Publications (2)

Publication Number Publication Date
JPS524328A JPS524328A (en) 1977-01-13
JPS5726405B2 true JPS5726405B2 (enrdf_load_stackoverflow) 1982-06-04

Family

ID=13713439

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50080264A Granted JPS524328A (en) 1975-06-27 1975-06-27 Device for making figures

Country Status (1)

Country Link
JP (1) JPS524328A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5398781A (en) * 1976-11-25 1978-08-29 Jeol Ltd Electron ray exposure unit
JP3120085B2 (ja) 1991-11-21 2000-12-25 株式会社セガ 電子装置及び情報担体

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3894271A (en) * 1973-08-31 1975-07-08 Ibm Method and apparatus for aligning electron beams

Also Published As

Publication number Publication date
JPS524328A (en) 1977-01-13

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