JPS57255A - Clean room - Google Patents

Clean room

Info

Publication number
JPS57255A
JPS57255A JP7276780A JP7276780A JPS57255A JP S57255 A JPS57255 A JP S57255A JP 7276780 A JP7276780 A JP 7276780A JP 7276780 A JP7276780 A JP 7276780A JP S57255 A JPS57255 A JP S57255A
Authority
JP
Japan
Prior art keywords
clean room
clean
room
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7276780A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6311569B2 (cs
Inventor
Seikichi Saitou
Masatoshi Komatani
Tsutomu Hanno
Fumio Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP7276780A priority Critical patent/JPS57255A/ja
Publication of JPS57255A publication Critical patent/JPS57255A/ja
Publication of JPS6311569B2 publication Critical patent/JPS6311569B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Central Air Conditioning (AREA)
  • Ventilation (AREA)
JP7276780A 1980-06-02 1980-06-02 Clean room Granted JPS57255A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7276780A JPS57255A (en) 1980-06-02 1980-06-02 Clean room

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7276780A JPS57255A (en) 1980-06-02 1980-06-02 Clean room

Publications (2)

Publication Number Publication Date
JPS57255A true JPS57255A (en) 1982-01-05
JPS6311569B2 JPS6311569B2 (cs) 1988-03-15

Family

ID=13498850

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7276780A Granted JPS57255A (en) 1980-06-02 1980-06-02 Clean room

Country Status (1)

Country Link
JP (1) JPS57255A (cs)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59204227A (ja) * 1983-05-04 1984-11-19 Nec Corp 清浄装置
JPS6033439A (ja) * 1983-08-02 1985-02-20 Nippon Muki Kk 搬送用クリ−ンユニツト並に搬送法
JPS63233231A (ja) * 1987-03-20 1988-09-28 Matsushita Electric Ind Co Ltd クリ−ン空間のメンテナンス装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5151144A (en) * 1974-10-31 1976-05-06 Nippon Telegraph & Telephone Kuriineakyokyusochi

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5151144A (en) * 1974-10-31 1976-05-06 Nippon Telegraph & Telephone Kuriineakyokyusochi

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59204227A (ja) * 1983-05-04 1984-11-19 Nec Corp 清浄装置
JPS6033439A (ja) * 1983-08-02 1985-02-20 Nippon Muki Kk 搬送用クリ−ンユニツト並に搬送法
JPS63233231A (ja) * 1987-03-20 1988-09-28 Matsushita Electric Ind Co Ltd クリ−ン空間のメンテナンス装置

Also Published As

Publication number Publication date
JPS6311569B2 (cs) 1988-03-15

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