JPS5723965U - - Google Patents

Info

Publication number
JPS5723965U
JPS5723965U JP1981093042U JP9304281U JPS5723965U JP S5723965 U JPS5723965 U JP S5723965U JP 1981093042 U JP1981093042 U JP 1981093042U JP 9304281 U JP9304281 U JP 9304281U JP S5723965 U JPS5723965 U JP S5723965U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1981093042U
Other languages
Japanese (ja)
Other versions
JPS6234689Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1981093042U priority Critical patent/JPS6234689Y2/ja
Publication of JPS5723965U publication Critical patent/JPS5723965U/ja
Application granted granted Critical
Publication of JPS6234689Y2 publication Critical patent/JPS6234689Y2/ja
Expired legal-status Critical Current

Links

JP1981093042U 1981-06-25 1981-06-25 Expired JPS6234689Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1981093042U JPS6234689Y2 (en) 1981-06-25 1981-06-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1981093042U JPS6234689Y2 (en) 1981-06-25 1981-06-25

Publications (2)

Publication Number Publication Date
JPS5723965U true JPS5723965U (en) 1982-02-06
JPS6234689Y2 JPS6234689Y2 (en) 1987-09-03

Family

ID=29454989

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1981093042U Expired JPS6234689Y2 (en) 1981-06-25 1981-06-25

Country Status (1)

Country Link
JP (1) JPS6234689Y2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0262040A (en) * 1988-08-27 1990-03-01 Nippon Steel Corp Mirror face processing of si wafer
JPH07164307A (en) * 1993-12-14 1995-06-27 Shin Etsu Handotai Co Ltd Polishing member and wafer polishing device

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100189970B1 (en) * 1995-08-07 1999-06-01 윤종용 A polishing apparatus for semiconductor wafer
JP2000288912A (en) * 2000-01-01 2000-10-17 Nikon Corp Abrasive polisher and its manufacture

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4862380A (en) * 1971-12-06 1973-08-31
JPS499792A (en) * 1972-05-26 1974-01-28

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4862380A (en) * 1971-12-06 1973-08-31
JPS499792A (en) * 1972-05-26 1974-01-28

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0262040A (en) * 1988-08-27 1990-03-01 Nippon Steel Corp Mirror face processing of si wafer
JPH07164307A (en) * 1993-12-14 1995-06-27 Shin Etsu Handotai Co Ltd Polishing member and wafer polishing device

Also Published As

Publication number Publication date
JPS6234689Y2 (en) 1987-09-03

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