JPS5723254B2 - - Google Patents
Info
- Publication number
- JPS5723254B2 JPS5723254B2 JP6944476A JP6944476A JPS5723254B2 JP S5723254 B2 JPS5723254 B2 JP S5723254B2 JP 6944476 A JP6944476 A JP 6944476A JP 6944476 A JP6944476 A JP 6944476A JP S5723254 B2 JPS5723254 B2 JP S5723254B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- ing And Chemical Polishing (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6944476A JPS52152173A (en) | 1976-06-14 | 1976-06-14 | Method of hardening aqueousssoluble resist pattern |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6944476A JPS52152173A (en) | 1976-06-14 | 1976-06-14 | Method of hardening aqueousssoluble resist pattern |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52152173A JPS52152173A (en) | 1977-12-17 |
| JPS5723254B2 true JPS5723254B2 (cs) | 1982-05-18 |
Family
ID=13402805
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6944476A Granted JPS52152173A (en) | 1976-06-14 | 1976-06-14 | Method of hardening aqueousssoluble resist pattern |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS52152173A (cs) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5840333B2 (ja) * | 1979-03-30 | 1983-09-05 | インタ−ナショナル ビジネス マシ−ンズ コ−ポレ−ション | 微小回路の製造方法 |
| JPS5844715A (ja) * | 1981-09-11 | 1983-03-15 | Fujitsu Ltd | 微細パタ−ン形成方法 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5040046A (cs) * | 1973-08-15 | 1975-04-12 | ||
| CH613059A5 (en) * | 1975-06-30 | 1979-08-31 | Hoechst Ag | Method for producing a flat-bed printing forme |
-
1976
- 1976-06-14 JP JP6944476A patent/JPS52152173A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS52152173A (en) | 1977-12-17 |