JPS5723237A - Spiral pusher - Google Patents

Spiral pusher

Info

Publication number
JPS5723237A
JPS5723237A JP9755080A JP9755080A JPS5723237A JP S5723237 A JPS5723237 A JP S5723237A JP 9755080 A JP9755080 A JP 9755080A JP 9755080 A JP9755080 A JP 9755080A JP S5723237 A JPS5723237 A JP S5723237A
Authority
JP
Japan
Prior art keywords
pusher
stroke
holes
small
constitution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9755080A
Other languages
Japanese (ja)
Other versions
JPS6257099B2 (en
Inventor
Tamotsu Sasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP9755080A priority Critical patent/JPS5723237A/en
Publication of JPS5723237A publication Critical patent/JPS5723237A/en
Publication of JPS6257099B2 publication Critical patent/JPS6257099B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers

Abstract

PURPOSE:To make the volume of a pusher extremely small by designing it to be spiral and to obtain a highly versatile pusher by making the stroke of the push member freely adjustable. CONSTITUTION:An inner end of a flexible pusher 18 is attached to a shaft 14 of a motor 12. The shaft 14 rotates to move an outer end member 20. A circular member 22 guides the member 18, and at an opening 16 in a body 10, a sensor is provided to adjust the stroke variably. A ray of a lamp 26 is sensed by a member 28 only when it goes through small holes 30, 32 in the member 18. The holes 30, 32 detect the reeling-in and -out positions respectively. The stroke between the holes 30, 32 is detected as the pulse number and is variably adjustable. By said constitution, a pusher which is small, low in cost and versatile can be obtained.
JP9755080A 1980-07-18 1980-07-18 Spiral pusher Granted JPS5723237A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9755080A JPS5723237A (en) 1980-07-18 1980-07-18 Spiral pusher

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9755080A JPS5723237A (en) 1980-07-18 1980-07-18 Spiral pusher

Publications (2)

Publication Number Publication Date
JPS5723237A true JPS5723237A (en) 1982-02-06
JPS6257099B2 JPS6257099B2 (en) 1987-11-30

Family

ID=14195343

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9755080A Granted JPS5723237A (en) 1980-07-18 1980-07-18 Spiral pusher

Country Status (1)

Country Link
JP (1) JPS5723237A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01137920U (en) * 1988-03-11 1989-09-20
JP2006044825A (en) * 2004-07-30 2006-02-16 Tani Electronics Corp Pusher for plate-like article such as printed substrate
JP2008501598A (en) 2004-06-11 2008-01-24 ザ ビーオーシー グループ ピーエルシー Freeze dryer
JP2008501597A (en) * 2004-06-11 2008-01-24 ザ ビーオーシー グループ ピーエルシー Freeze dryer
US20140166800A1 (en) * 2012-12-13 2014-06-19 Wu-Chih Hsieh Control device for fastening strap unit

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5278262U (en) * 1975-12-10 1977-06-10
JPS5675327A (en) * 1979-11-15 1981-06-22 Matsushita Electric Ind Co Ltd Automatic feeding device for plate-shaped parts

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5278262U (en) * 1975-12-10 1977-06-10
JPS5675327A (en) * 1979-11-15 1981-06-22 Matsushita Electric Ind Co Ltd Automatic feeding device for plate-shaped parts

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01137920U (en) * 1988-03-11 1989-09-20
JP2008501598A (en) 2004-06-11 2008-01-24 ザ ビーオーシー グループ ピーエルシー Freeze dryer
JP2008501597A (en) * 2004-06-11 2008-01-24 ザ ビーオーシー グループ ピーエルシー Freeze dryer
JP2013145111A (en) * 2004-06-11 2013-07-25 Ima Life Srl Assembly for insertion or removal of vial in freeze dryer
JP2006044825A (en) * 2004-07-30 2006-02-16 Tani Electronics Corp Pusher for plate-like article such as printed substrate
US20140166800A1 (en) * 2012-12-13 2014-06-19 Wu-Chih Hsieh Control device for fastening strap unit

Also Published As

Publication number Publication date
JPS6257099B2 (en) 1987-11-30

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