JPS5722416B2 - - Google Patents

Info

Publication number
JPS5722416B2
JPS5722416B2 JP5533277A JP5533277A JPS5722416B2 JP S5722416 B2 JPS5722416 B2 JP S5722416B2 JP 5533277 A JP5533277 A JP 5533277A JP 5533277 A JP5533277 A JP 5533277A JP S5722416 B2 JPS5722416 B2 JP S5722416B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP5533277A
Other languages
Japanese (ja)
Other versions
JPS53140974A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5533277A priority Critical patent/JPS53140974A/ja
Publication of JPS53140974A publication Critical patent/JPS53140974A/ja
Publication of JPS5722416B2 publication Critical patent/JPS5722416B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • Weting (AREA)
JP5533277A 1977-05-16 1977-05-16 Semiconductor surface treating method Granted JPS53140974A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5533277A JPS53140974A (en) 1977-05-16 1977-05-16 Semiconductor surface treating method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5533277A JPS53140974A (en) 1977-05-16 1977-05-16 Semiconductor surface treating method

Publications (2)

Publication Number Publication Date
JPS53140974A JPS53140974A (en) 1978-12-08
JPS5722416B2 true JPS5722416B2 (ko) 1982-05-13

Family

ID=12995572

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5533277A Granted JPS53140974A (en) 1977-05-16 1977-05-16 Semiconductor surface treating method

Country Status (1)

Country Link
JP (1) JPS53140974A (ko)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0126888B2 (ko) * 1982-09-22 1989-05-25 Geburu* Hatsupitsuhi Gmbh
JPH0315401Y2 (ko) * 1984-07-30 1991-04-04
JPH0329609B2 (ko) * 1983-10-08 1991-04-24

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4911081A (ko) * 1972-05-26 1974-01-31
JPS5051264A (ko) * 1973-09-07 1975-05-08
JPS50154070A (ko) * 1974-05-31 1975-12-11

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4911081A (ko) * 1972-05-26 1974-01-31
JPS5051264A (ko) * 1973-09-07 1975-05-08
JPS50154070A (ko) * 1974-05-31 1975-12-11

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0126888B2 (ko) * 1982-09-22 1989-05-25 Geburu* Hatsupitsuhi Gmbh
JPH0329609B2 (ko) * 1983-10-08 1991-04-24
JPH0315401Y2 (ko) * 1984-07-30 1991-04-04

Also Published As

Publication number Publication date
JPS53140974A (en) 1978-12-08

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